Cov txheej txheem kub ntawm cov hlau tsis kam hloov pauv nrog cov tuab ntawm cov zaj duab xis, cov zaj duab xis nyias tsis zoo, cov zaj duab xis tuab zoo, thiab cov zaj duab xis tuab zoo sib xws tab sis tsis zoo ib yam li cov ntaub ntawv loj. Feem ntau, cov txheej txheem kub ntawm cov hlau tsis kam hloov pauv ntawm qhov tsis zoo mus rau qhov zoo thaum cov zaj duab xis tuab nce mus txog kaum tawm nanometers.
Ntxiv mus, qhov evaporation rate kuj cuam tshuam rau qhov resistive temperature coefficient ntawm cov yeeb yaj kiab hlau. Qhov evaporation rate qis uas npaj los ntawm cov txheej zaj duab xis yog xoob, cov electrons hla nws lub peev xwm barrier thiab lub peev xwm los tsim conductivity tsis muaj zog, ua ke nrog oxidation thiab adsorption, yog li tus nqi tsis kam siab, qhov tsis kam kub coefficient yog me me, lossis txawm tias tsis zoo, nrog rau qhov nce ntawm qhov evaporation rate, qhov tsis kam kub coefficient ntawm qhov tsis kam ntawm qhov hloov me me los ntawm loj, los ntawm tsis zoo mus rau qhov zoo. Qhov no yog vim qhov evaporation rate qis ntawm cov yeeb yaj kiab npaj vim yog qhov oxidation ntawm cov khoom semiconductor, qhov tsis kam kub coefficient ntawm qhov tsis zoo. Cov yeeb yaj kiab npaj ntawm qhov evaporation rate siab feem ntau muaj cov khoom hlau thiab muaj qhov tsis kam kub coefficient zoo.
Vim tias cov qauv ntawm zaj duab xis hloov pauv tsis tau nrog qhov kub thiab txias, qhov tsis kam thiab qhov kub thiab txias ntawm zaj duab xis kuj hloov pauv nrog qhov kub ntawm txheej txheej thaum lub sijhawm evaporation, thiab cov zaj duab xis nyias dua, qhov kev hloov pauv ntau dua. Qhov no tuaj yeem xav txog tias yog qhov tshwm sim ntawm cov kev hloov pauv tshuaj lom neeg los ntawm kev rov ua dua thiab rov faib cov khoom me me ntawm cov kob ze lossis cov qauv tubular ntawm lub substrate, nrog rau kev tawg ntawm cov lattice, kev tawg ntawm cov khoom tsis huv, kev tawg ntawm cov lattice defects, thiab oxidation.
– Tsab xov xwm no yog tso tawm los ntawmtshuab nqus tsev txheej tshuab tsim khoomr Guangdong Zhenhua
Lub sijhawm tshaj tawm: Lub Ib Hlis-18-2024

