I-coefficient yobushushu bokumelana nefilimu yesinyithi iyahluka ngokobukhulu befilimu, iifilimu ezincinci zimbi, iifilimu ezixineneyo zimbi, kwaye iifilimu ezixineneyo ziyafana kodwa azifani nezinto ezinkulu. Ngokubanzi, i-coefficient yobushushu bokumelana nokumelana iyatshintsha ukusuka kwi-negative ukuya kwi-positive njengoko ubukhulu befilimu bunyuka ukuya kwi-nanometers ezilishumi.
Ukongeza, izinga lokuphuma komoya likwachaphazela i-coefficient yobushushu obuchasene neefilimu zesinyithi. Izinga eliphantsi lokuphuma komoya elilungiselelwe ngumaleko wefilimu likhululekile, ii-elektroni ezingaphaya komqobo walo onokubakho kunye nokukwazi ukuvelisa i-conductivity kubuthathaka, kudibene ne-oxidation kunye ne-adsorption, ngoko ke ixabiso lokuchasana liphezulu, i-coefficient yobushushu bokumelana incinci, okanye imbi, kunye nokwanda kwesantya sokuphuma komoya, i-coefficient yobushushu bokumelana yotshintsho oluncinci ukusuka kwi-big, ukusuka kwi-negative ukuya kwi-positive. Oku kungenxa yezinga eliphantsi lokuphuma komoya kwefilimu elungiselelwe ngenxa ye-oxidation yeepropati ze-semiconductor, i-coefficient yobushushu bokumelana yamaxabiso angalunganga. Iifilimu ezilungiselelwe ngesantya esiphezulu sokuphuma komoya zihlala zineempawu zesinyithi kwaye zine-coefficient yobushushu bokumelana obuhle.
Ekubeni ulwakhiwo lwefilimu lutshintsha ngokungenakujikwa ngenxa yobushushu, i-resistance kunye ne-resistance temperature coefficient yefilimu itshintsha ne-temperature yomaleko wokugquma ngexesha lokufuma, kwaye okukhona ifilimu incinci, kokukhona utshintsho luba lukhulu. Oku kunokucingwa ngenxa yotshintsho lweekhemikhali olubangelwa kukuphinda kuphume umphunga kunye nokusasazwa kwakhona kwamasuntswana e-island okanye i-tubular structure film kwi-substrate, kunye nokusasazeka kwe-lattice, ukusasazeka kokungcola, ukusasazeka kweziphene ze-lattice, kunye ne-oxidation.
–Eli nqaku likhutshwe nguukwenziwa komatshini wokugquma nge-vacuumr Guangdong Zhenhua
Ixesha leposi: Jan-18-2024