Ukufakwa kwe-ion beam ngqo uhlobo lokufakwa kwe-ion beam okusizwa yi-ion beam. Ukufakwa kwe-ion beam ngqo kuyi-ion beam deposition engahlukanisiwe ngobuningi. Le ndlela yaqala ukusetshenziswa ukukhiqiza amafilimu e-carbon afana nedayimane ngo-1971, ngokusekelwe esimisweni sokuthi ingxenye eyinhloko ye-cathode ne-anode yomthombo we-ion yenziwe nge-carbon.
Igesi enengqondo iholwa ingene ekamelweni lokukhipha, bese kufakwa insimu yamagnetic yangaphandle ukuze ibangele ukukhishwa kwe-plasma ngaphansi kwezimo zokucindezela okuphansi, kuncike emphumeleni wokuphalaza kwama-ion kuma-electrode ukukhiqiza ama-ion e-carbon. Ama-ion e-carbon nama-ion aqinile ku-plasma afakwa ekamelweni lokufaka ngesikhathi esifanayo, futhi asheshiswa ukuze afakwe ku-substrate ngenxa yokucindezela okungathandeki ku-substrate.
Imiphumela yokuhlolwa ikhombisa ukuthi ama-ion e-carbon anamandla angu-50 ~ 100eV ku-igumbiizinga lokushisa, ku-Si, NaCI, KCI, Ni kanye nezinye izinto ezisetshenziswa ekulungiseleleni ifilimu yekhabhoni ecacile efana nedayimane, ukumelana okuphezulu njengo-10Q-cm, inkomba yokubuyisa cishe engu-2, enganyibiliki kuma-asidi angaphili kanye nama-organic, inobulukhuni obuphezulu kakhulu.
——Lesi sihloko sikhishwe yi-umenzi womshini wokumboza nge-vacuumI-Guangdong Zhenhua
Isikhathi sokuthunyelwe: Agasti-31-2023