Ukufakwa kwe-ion beam ngqo luhlobo lokufakwa kwe-ion beam ngoncedo. Ukufakwa kwe-ion beam ngqo kukufakwa kwe-ion beam okungahlukaniswanga ngobuninzi. Le ndlela yasetyenziswa okokuqala ukuvelisa iifilimu zekhabhoni ezifana nedayimani ngo-1971, ngokusekelwe kumgaqo wokuba inxalenye ephambili ye-cathode kunye ne-anode yomthombo we-ion yenziwe ngekhabhoni.
Igesi eqondakalayo ihanjiswa kwigumbi lokukhupha, kwaye kongezwa intsimi yemagnethi yangaphandle ukuze kubangele ukukhutshwa kweplasma phantsi kweemeko zoxinzelelo oluphantsi, kuxhomekeke kwisiphumo sokutshiza kwee-ions kwi-electrodes ukuvelisa ii-ion zekhabhoni. Ii-ion zekhabhoni kunye nee-ion ezixineneyo kwi-plasma zafakwa kwigumbi lokufaka ngexesha elinye, kwaye zakhawuleziswa ukuba zifakwe kwi-substrate ngenxa yoxinzelelo olubi kwi-substrate.
Iziphumo zovavanyo zibonisa ukuba ii-ion zekhabhoni ezinamandla angama-50 ~ 100eV kwiigumbiubushushu, kwi-Si, NaCI, KCI, Ni kunye nezinye izinto ezisetyenziswa ekulungiseleleni ifilimu yekhabhoni ecacileyo efana nedayimani, ukumelana nobushushu obuphezulu njenge-10Q-cm, isalathisi sokuchasana esimalunga ne-2, esinganyibilikiyo kwii-asidi ezingaphiliyo nezingaphiliyo, sinobunzima obuphezulu kakhulu.
——Eli nqaku likhutshwe nguumenzi womatshini wokugquma nge-vacuumGuangdong Zhenhua
Ixesha lokuthumela: Agasti-31-2023