Shigar da hasken ion kai tsaye wani nau'in ajiyar hasken ion ne da aka taimaka wa hasken. Shigar da hasken ion kai tsaye wani ajiyar hasken ion ne da ba a raba shi da yawa ba. An fara amfani da wannan dabarar don samar da fina-finan carbon masu kama da lu'u-lu'u a shekarar 1971, bisa ga ka'idar cewa babban ɓangaren cathode da anode na tushen ion an yi shi ne da carbon.
Ana shigar da iskar gas mai ma'ana cikin ɗakin fitarwa, sannan a ƙara wani filin maganadisu na waje don haifar da fitar da plasma a ƙarƙashin yanayin matsin lamba mai ƙarancin yawa, yana dogara da tasirin sputtering na ions akan electrodes don samar da ions na carbon. An haifar da ions na carbon da ions masu yawa a cikin plasma cikin ɗakin ajiya a lokaci guda, kuma an hanzarta su don a saka su a kan substrate saboda matsin lamba mara kyau akan substrate.
Sakamakon gwajin ya nuna cewa ions na carbon tare da ƙarfin 50 ~ 100eV aɗakizafin jiki, a cikin Si, NaCI, KCI, Ni da sauran abubuwan da aka gyara yayin shirya fim ɗin carbon mai kama da lu'u-lu'u, juriya har zuwa 10Q-cm, ma'aunin refractive na kimanin 2, wanda ba ya narkewa a cikin acid marasa tsari da na halitta, yana da tauri sosai.
——An fitar da wannan labarin ne ta hannuninjin shafa injin injinGuangdong Zhenhua
Lokacin Saƙo: Agusta-31-2023