Kuika ion beam deposition mwachindunji ndi mtundu wa ion beam assisted deposition. Kuika ion beam deposition mwachindunji ndi ion beam deposition yosalekanitsidwa ndi unyinji. Njirayi idagwiritsidwa ntchito koyamba kupanga mafilimu a carbon ofanana ndi diamondi mu 1971, kutengera mfundo yakuti gawo lalikulu la cathode ndi anode ya gwero la ion limapangidwa ndi kaboni.
Mpweya womveka bwino umalowetsedwa mu chipinda chotulutsira madzi, ndipo mphamvu yakunja ya maginito imawonjezedwa kuti ipangitse kutuluka kwa plasma pansi pa mikhalidwe yotsika ya kupanikizika, kudalira mphamvu ya ma ayoni pa ma electrode kuti apange ma ayoni a kaboni. Ma ayoni a kaboni ndi ma ayoni okhuthala mu plasma adalowetsedwa mu chipinda chosungira madzi nthawi yomweyo, ndipo adafulumizitsidwa kuti alowe mu substrate chifukwa cha kupsinjika kwa bias pa substrate.
Zotsatira za mayeso zikuwonetsa kuti ma ion a kaboni okhala ndi mphamvu ya 50 ~ 100eV pachipindakutentha, mu Si, NaCI, KCI, Ni ndi zina zomwe zimagwiritsidwa ntchito popanga filimu yowonekera ngati diamondi, resistivity yofanana ndi 10Q-cm, refractive index ya pafupifupi 2, yosasungunuka mu ma acid osapangidwa ndi organic, imakhala ndi kuuma kwakukulu.
——Nkhaniyi yatulutsidwa ndiwopanga makina ophikira vacuumGuangdong Zhenhua
Nthawi yotumizira: Ogasiti-31-2023