Kev tso cov ion beam ncaj qha yog ib hom kev tso cov ion beam pab. Kev tso cov ion beam ncaj qha yog kev tso cov ion beam tsis sib cais. Cov txheej txheem no tau siv thawj zaug los tsim cov yeeb yaj kiab carbon zoo li pob zeb diamond hauv xyoo 1971, raws li lub hauv paus ntsiab lus tias qhov tseem ceeb ntawm cathode thiab anode ntawm qhov chaw ion yog ua los ntawm carbon.
Cov roj sensible raug coj mus rau hauv lub chamber tso tawm, thiab ntxiv ib lub magnetic field sab nraud los ua rau plasma tso tawm hauv qab qhov xwm txheej siab qis, vam khom cov nyhuv sputtering ntawm cov ions ntawm cov electrodes los tsim cov carbon ions. Cov carbon ions thiab cov ions ntom ntom hauv cov plasma tau raug coj mus rau hauv lub chamber tso tawm tib lub sijhawm, thiab lawv tau raug nrawm kom raug txhaj rau ntawm lub substrate vim yog qhov tsis zoo bias siab ntawm lub substrate.
Cov txiaj ntsig ntawm kev sim qhia tau hais tias cov pa roj carbon ions nrog lub zog ntawm 50 ~ 100 eV ntawmchavkub, hauv Si, NaCI, KCI, Ni thiab lwm yam substrates ntawm kev npaj cov pob zeb diamond-zoo li carbon zaj duab xis, resistivity siab txog 10Q-cm, refractive index ntawm txog 2, insoluble nyob rau hauv inorganic thiab organic acids, muaj ib tug siab heev hardness.
—— Tsab xov xwm no yog tso tawm los ntawmlub tshuab nqus tsev txheej tshuab chaw tsim khoomGuangdong Zhenhua
Lub sijhawm tshaj tawm: Lub Yim Hli-31-2023