Imishini yokumboza nge-vacuum ngokuvamile yakhiwa izingxenye eziningana ezibalulekile, ngayinye inomsebenzi wayo othize, ezisebenza ngokubambisana ukuze kufezwe ukufakwa kwefilimu okuphumelelayo nokufanayo. Ngezansi kunencazelo yezingxenye eziyinhloko nemisebenzi yazo:
Izingxenye Eziyinhloko
Igumbi lokuhlanza:
Umsebenzi: Ihlinzeka ngendawo enomfutho ophansi noma ene-vacuum ephezulu ukuvimbela izinto zokumboza ukuthi zingasabelani nokungcola okusemoyeni ngesikhathi sokuhwamuka noma ukuchitheka, okuqinisekisa ubumsulwa nekhwalithi yefilimu.
Isakhiwo: Ngokuvamile senziwe ngensimbi engagqwali noma i-aluminium enamandla aphezulu, ukwakheka kwangaphakathi kubheka ukusatshalaliswa komoya kanye nokubekwa kalula kwe-substrate.
Uhlelo lwephampu yokuhlanza:
Umsebenzi: Kusetshenziselwa ukupompa igesi ngaphakathi kwegumbi lokuhlanza ukuze kufinyelelwe izinga lokuhlanza elidingekayo.
Izinhlobo: Kufaka phakathi amaphampu omshini (isb. amaphampu e-rotary vane), amaphampu e-turbomolecular, amaphampu okusabalalisa kanye namaphampu e-ion.
Umthombo wokuhwamuka noma umthombo wokuchitheka:
Umsebenzi: ufudumeza futhi uphefumise izinto zokumboza ukuze kwakheke umusi noma i-plasma ku-vacuum.
Izinhlobo: kufaka phakathi umthombo wokushisa wokumelana, umthombo wokuhwamuka kwe-electron beam, umthombo wokubhoboza we-magnetron kanye nomthombo wokuhwamuka kwe-laser, njll.
Isibambi se-substrate kanye nendlela yokujikeleza:
Umsebenzi: Ibamba i-substrate futhi iqinisekisa ukufakwa okufanayo kwezinto zokumboza ebusweni be-substrate ngokujikeleza noma ukujikisa.
UKWAKHA: Ngokuvamile kufaka phakathi ama-clamp alungisekayo kanye nezindlela ezijikelezayo/ezinyakazayo ukuze kuhlangatshezwane nezakhiwo ezinezimo nobukhulu obuhlukene.
Uhlelo lokuphakelwa kukagesi nokulawula:
Umsebenzi: Inikeza amandla emthonjeni wokuhwamuka, umthombo wokuchitheka kanye neminye imishini, futhi ilawula amapharamitha enqubo yokumboza iyonke njengokushisa, i-vacuum kanye nesikhathi.
Izingxenye: Kufaka phakathi izinsiza zikagesi, amaphaneli okulawula, izinhlelo zokulawula zekhompyutha, kanye nezinzwa zokuqapha.
Uhlelo Lokuphakelwa Kwegesi (lwemishini yokumboza nge-sputter):
Umsebenzi: Uhlinzeka ngamagesi angasebenzi (isb., i-argon) noma amagesi asebenzayo (isb., i-oxygen, i-nitrogen) ukuze kugcinwe i-plasma noma kuhlanganyelwe ekusabeleni kwamakhemikhali ukuze kukhiqizwe ifilimu ethile encane.
Izingxenye: Kufaka phakathi amasilinda egesi, izilawuli zokugeleza, kanye namapayipi okulethwa kwegesi.
Uhlelo Lokupholisa:
Umsebenzi: upholisa umthombo wokuhwamuka, umthombo wokuchitheka kanye negumbi lokuhlanza ukuvimbela ukushisa ngokweqile.
Izinhlobo: zifaka phakathi izinhlelo zokupholisa amanzi kanye nezinhlelo zokupholisa umoya, njll.
Uhlelo lokuqapha nokuthola:
Umsebenzi: Ukuqapha ngesikhathi sangempela kwamapharamitha abalulekile enqubweni yokumboza, njengobukhulu befilimu, izinga lokufakwa, i-vacuum kanye nokushisa, ukuqinisekisa ikhwalithi yokumboza.
Izinhlobo: kufaka phakathi i-quartz crystal microbalance, i-optical thickness monitor kanye ne-residual gas analyzer, njll.
Amadivayisi okuvikela:
Umsebenzi: Iqinisekisa ukuphepha kwabasebenzi kanye nemishini ezingozini ezibangelwa amazinga okushisa aphezulu, ama-voltage aphezulu noma izindawo zokuhlanza umoya.
Izingxenye: Kufaka phakathi onogada, izinkinobho zokuma eziphuthumayo kanye nezikhiye zokuphepha, njll.
Fingqa.
Imishini yokumboza nge-vacuum igcwalisa inqubo yokufaka amafilimu amancane asezingeni eliphezulu ngokusebenzisana kwalezi zingxenye. Le mishini idlala indima ebalulekile ekulungiseleleni amafilimu amancane abonakalayo, e-elekthronikhi, okuhlobisa nawokusebenza kahle.
–Lesi sihloko sikhishwe yi-umenzi womshini wokumboza nge-vacuumI-Guangdong Zhenhua
Isikhathi sokuthunyelwe: Julayi-23-2024