Ibice bigize ibikoresho byo gusiga irangi mu cyuma gishyuha

Ibikoresho byo gusiga irangi mu cyuma gishyushya ubusanzwe bigizwe n'ibice byinshi by'ingenzi, buri kimwe gifite akazi kacyo, bikora hamwe kugira ngo bigere ku buryo bunoze kandi bungana. Hasi hari ibisobanuro by'ibice by'ingenzi n'imirimo yabyo:

Ibice by'ingenzi
Icyumba cyo gusohora umwuka:
Imikorere: Itanga ahantu hafite umuvuduko muke cyangwa hadafite umwuka mwinshi kugira ngo hirindwe ko ibikoresho byo gutwikira byahura n'imyanda yo mu kirere mu gihe cyo guhumeka cyangwa gutemba, bigatuma firime irangwa n'ubuziranenge n'ubwiza.
Imiterere: Ubusanzwe ikozwe mu cyuma gikomeye, icyuma kitagira umugese cyangwa aluminiyumu, imiterere y'imbere ireba uburyo umwuka ukwirakwira ndetse n'uburyo ibintu bishyirwa mu buryo bworoshye.
Sisitemu yo gupompa imashini ikoresha umwuka ushyushye:
Imikorere: Ikoreshwa mu gusohora umwuka uri mu cyumba cy'imyanda kugira ngo ugere ku rugero rukenewe rw'imyanda.
Ubwoko: Harimo ipompo za mechanical (urugero: pompe za rotary vane), pompe za turbomolecular, pompe za diffusion na pompe za ion.
Isoko y'umwuka cyangwa isoko y'amazi asohoka:
Imikorere: ishyushya kandi igahindura umwuka w'ibikoresho byo gusiga kugira ngo bikore umwuka cyangwa plasma mu cyuma gifunze.
Ubwoko: harimo isoko yo gushyushya ikoreshwa n'ubudahangarwa, isoko yo gushyushya imirasire ya elegitoroniki, isoko yo gushyushya magnetron n'isoko yo gushyushya hakoreshejwe laser, n'ibindi.
Icyuma gifata substrate n'uburyo bwo kuzenguruka:
Imikorere: Ifata substrate kandi igatuma ibikoresho byo gusiga bishyirwa ku buso bwa substrate bizenguruka cyangwa bizunguruka.
UBWUBATSI: Ubusanzwe bukubiyemo imigozi ishobora guhindurwa n'uburyo bwo kuzenguruka/guhindura imiyoboro kugira ngo ijyane n'ibintu bifite imiterere n'ingano bitandukanye.
Sisitemu yo gutanga amashanyarazi no kuyagenzura:
Imikorere: Itanga ingufu ku isoko y'amazi aturuka mu kirere, isoko isohora amazi n'ibindi bikoresho, kandi igenzura ibipimo by'uburyo bwose bwo gusiga nk'ubushyuhe, isuku n'igihe.
Ibice bigize: Birimo amashanyarazi, paneli zo kugenzura, sisitemu zo kugenzura za mudasobwa, na sensor zo kugenzura.
Sisitemu yo gutanga gazi (ku bikoresho byo gusiga sputter):
Imikorere: Itanga imyuka idafite imbaraga (urugero, argon) cyangwa imyuka ikora (urugero, ogisijeni, azote) kugira ngo igumane plasma cyangwa kugira uruhare mu gukora chemical reaction kugira ngo habeho firime ntoya runaka.
Ibice bigize: Harimo silinda za gazi, ibikoresho bigenzura amazi, n'imiyoboro itwara gazi.
Sisitemu yo gukonjesha:
Imikorere: ikonjesha isoko y'amazi, isoko isohora amazi n'icyumba cy'umwuka kugira ngo hirindwe ubushyuhe bwinshi.
Ubwoko: harimo uburyo bwo gukonjesha amazi n'uburyo bwo gukonjesha umwuka, n'ibindi.
Sisitemu yo kugenzura no gutahura:
Imikorere: Gukurikirana mu buryo bwihuse ibipimo by'ingenzi mu gikorwa cyo gusiga, nk'ubugari bwa firime, igipimo cyo kuyishyiramo, isuku n'ubushyuhe, kugira ngo harebwe ubwiza bwabyo.
Ubwoko: harimo microbalance ya quartz crystal, optical thickness monitor na residual gas analyzer, nibindi.
Ibikoresho byo kurinda:
Imikorere: Igenzura umutekano w'abakoresha n'ibikoresho ku ngaruka ziterwa n'ubushyuhe bwinshi, voltage nyinshi cyangwa ahantu hadakoreshejwe umwuka.
Ibikoresho: Birimo abarinzi, utubuto two guhagarara mu gihe cy'impanuka n'ingufuri z'umutekano, n'ibindi.
Vuga muri make.
Ibikoresho byo gusiga irangi ry’ibikoresho bikoresha imashini bitanga uburyo bwo gushyiramo filime zoroheje zo mu rwego rwo hejuru binyuze mu bikorwa by’ibi bice. Izi mashini zigira uruhare runini mu gutegura filime zoroheje, iz’ikoranabuhanga, iz’imitako n’iz’imikorere myiza.

–Iyi nkuru yasohotse nauruganda rukora imashini zikora imashini zikoresha umwuka ushyushyeGuangdong Zhenhua