Lisebelisoa tsa ho koahela ka vacuum hangata li entsoe ka likarolo tse 'maloa tsa bohlokoa, e' ngoe le e 'ngoe e na le mosebetsi oa eona o ikhethang, tse sebetsang hammoho ho fihlela ho kenngoa ha filimi ka katleho le ka mokhoa o ts'oanang. Ka tlase ke tlhaloso ea likarolo tsa mantlha le mesebetsi ea tsona:
Likarolo tse ka Sehloohong
Kamore ea ho hloekisa:
Mosebetsi: E fana ka tikoloho e nang le khatello e tlase kapa e se nang letho le leholo ho thibela thepa ea ho roala hore e se ke ea arabela le litšila tse tsamaeang moeeng nakong ea mouoane kapa ho qhalana ha metsi, ho netefatsa bohloeki le boleng ba filimi.
Sebopeho: Hangata se entsoe ka tšepe e sa ruseng kapa aluminium e matla haholo, moralo oa kahare o ela hloko kabo ea moea le bonolo ba ho beha substrate.
Sistimi ea pompo ea vacuum:
Mosebetsi: E sebelisoa ho pompa khase ka hare ho kamore ea vacuum ho fihlela boemo bo hlokahalang ba vacuum.
Mefuta: Ho kenyeletsoa lipompo tsa mechini (mohlala, lipompo tsa rotary vane), lipompo tsa turbomolecular, lipompo tsa phatlalatso le lipompo tsa ion.
Mohloli oa mouoane kapa mohloli oa ho qhala:
Mosebetsi: o futhumatsa le ho fetola thepa e koahelang hore e be mouoane ho etsa mouoane kapa plasma ka har'a vacuum.
Mefuta: ho kenyeletsoa mohloli oa ho futhumatsa o hanyetsang, mohloli oa mouoane oa mahlaseli a elektrone, mohloli oa ho sputtering oa magnetron le mohloli oa mouoane oa laser, jj.
Sehokelo sa substrate le mokhoa o potolohang:
Mosebetsi: E tšoara substrate mme e netefatsa hore thepa ea ho roala e lula e le ka mokhoa o ts'oanang holim'a substrate ka ho potoloha kapa ho sisinyeha.
KAHO: Hangata e kenyelletsa di-clamp tse fetolwang le mekgwa e potolohang/e sisinyehang ho amohela di-substrate tsa dibopeho le boholo bo fapaneng.
Sistimi ea phepelo ea motlakase le taolo:
Mosebetsi: E fana ka matla mohloling oa mouoane, mohloli oa ho qhala le lisebelisoa tse ling, 'me e laola liparamente tsa ts'ebetso eohle ea ho roala joalo ka mocheso, vacuum le nako.
Likarolo: E kenyelletsa phepelo ea motlakase, liphanele tsa taolo, litsamaiso tsa taolo tsa khomphutha, le li-sensor tsa tlhokomelo.
Sistimi ea Phepelo ea Khase (bakeng sa lisebelisoa tsa ho roala ka sputter):
Mosebetsi: E fana ka likhase tse sa sebetseng (mohlala, argon) kapa likhase tse arabelang (mohlala, oksijene, naetrojene) ho boloka plasma kapa ho nka karolo karabelong ea lik'hemik'hale ho hlahisa filimi e itseng e tšesaane.
Likarolo: E kenyelletsa lisilindara tsa khase, li-controller tsa phallo, le liphaephe tsa ho tsamaisa khase.
Sistimi ea ho Pholisa:
Mosebetsi: e pholisa mohlodi wa mouoane, mohlodi wa ho ntsha metsi le kamore ya vacuum ho thibela ho chesa haholo.
Mefuta: kenyeletsa litsamaiso tsa ho pholisa metsi le litsamaiso tsa ho pholisa moea, jj.
Sistimi ea ho beha leihlo le ho lemoha:
Mosebetsi: Tlhokomelo ea nako ea sebele ea liparamente tsa bohlokoa ts'ebetsong ea ho roala, joalo ka botenya ba filimi, sekhahla sa ho beha, vacuum le mocheso, ho netefatsa boleng ba ho roala.
Mefuta: ho kenyeletsoa le microbalance ea kristale ea quartz, monitor ea botenya ba optical le analyzer ea khase e setseng, jj.
Lisebelisoa tse sireletsang:
Mosebetsi: E netefatsa polokeho ea basebetsi le lisebelisoa likotsing tse bakoang ke mocheso o phahameng, li-voltage tse phahameng kapa libaka tsa vacuum.
Likarolo: E kenyelletsa balebeli, likonopo tsa ho emisa ka tšohanyetso le li-interlock tsa polokeho, jj.
Akaretsa.
Lisebelisoa tsa ho koahela ka vacuum li phethahatsa ts'ebetso ea ho beha lifilimi tse tšesaane tsa boleng bo holimo ka ts'ebetso ea tšebelisano ea likarolo tsena. Mechini ena e bapala karolo ea bohlokoa ho lokiseng lifilimi tse tšesaane tsa optical, elektroniki, mekhabiso le tse sebetsang.
–Sengoloa sena se lokollotsoe kemoetsi oa mochini oa ho roala ka vacuum cleanerGuangdong Zhenhua
Nako ea poso: Phupu-23-2024