Izixhobo zokugquma nge-vacuum zihlala zenziwe ngamacandelo aliqela abalulekileyo, ngalinye linomsebenzi walo, asebenza ngaxeshanye ukuze kufunyanwe ifilimu efanelekileyo nefanayo. Apha ngezantsi kukho inkcazo yamacandelo aphambili kunye nemisebenzi yawo:
Izinto eziphambili
Igumbi lokucoca umoya:
Umsebenzi: Ibonelela ngendawo enoxinzelelo oluphantsi okanye ene-vacuum ephezulu ukuthintela izinto zokugquma ukuba zingasabelani nokungcola okuphuma emoyeni ngexesha lokufuma okanye ukutshiza, ukuqinisekisa ubunyulu kunye nomgangatho wefilimu.
Ulwakhiwo: Ngokwesiqhelo lwenziwe ngentsimbi engagqwaliyo okanye i-aluminium enamandla aphezulu, uyilo lwangaphakathi luqwalasela ukusasazwa komoya kunye nokulula kokubekwa kwe-substrate.
Inkqubo yepompo yokucoca umoya:
Umsebenzi: Isetyenziselwa ukupompa igesi ngaphakathi kwigumbi lokucoca ulwelo ukuze kufezekiswe inqanaba lokucoca ulwelo elifunekayo.
Iindidi: Kubandakanya iimpompo zoomatshini (umz. iimpompo ze-rotary vane), iimpompo ze-turbomolecular, iimpompo zokusasaza kunye neempompo ze-ion.
Umthombo womphunga okanye umthombo wokutshiza:
Umsebenzi: ufudumeza kwaye uphelise izinto zokugquma ukuze zenze umphunga okanye iplasma kwi-vacuum.
Iintlobo: kubandakanya umthombo wokufudumeza ochaseneyo, umthombo wokufuma we-electron beam, umthombo wokutshiza we-magnetron kunye nomthombo wokufuma we-laser, njl.
Isibambi se-substrate kunye nendlela yokujikeleza:
Umsebenzi: Ubamba i-substrate kwaye uqinisekisa ukuba izinto zokugquma zifakwa ngokulinganayo kumphezulu we-substrate ngokujikeleza okanye ngokujikeleza.
ULWAKHIWO: Ngokwesiqhelo luquka ii-clamps ezihlengahlengiswayo kunye neendlela ezijikelezayo/ezijikajikayo ukuze zilungele ii-substrates zeemilo nobukhulu obahlukeneyo.
Inkqubo yokubonelela ngombane kunye nolawulo:
Umsebenzi: Inika amandla kumthombo wokufuma, umthombo wokutshiza kunye nezinye izixhobo, kwaye ilawula iiparameter zenkqubo yokugquma iyonke efana nobushushu, i-vacuum kunye nexesha.
Izinto ezisetyenziswayo: Ziquka izixhobo zombane, iiphaneli zolawulo, iinkqubo zolawulo zekhompyutha, kunye nezinzwa zokubeka esweni.
Inkqubo yoNikezelo lweGesi (yezixhobo zokugquma nge-sputter):
Umsebenzi: Ubonelela ngeegesi ezingasebenziyo (umz., i-argon) okanye iigesi ezisabelayo (umz., ioksijini, initrogen) ukugcina iplasma okanye ukuthatha inxaxheba kwimpendulo yeekhemikhali ukuvelisa ifilimu ethile encinci.
Izinto ezisetyenziswayo: Ziquka iisilinda zegesi, abalawuli bokuhamba kwamanzi, kunye nemibhobho yokuhambisa igesi.
Inkqubo yokupholisa:
Umsebenzi: upholisa umthombo wokufuma, umthombo wokutshiza kunye negumbi lokufunxa ukuthintela ubushushu obugqithisileyo.
Iindidi: ziquka iinkqubo zokupholisa amanzi kunye neenkqubo zokupholisa umoya, njl.
Inkqubo yokubeka esweni nokubhaqa:
Umsebenzi: Ukubeka esweni iiparameter eziphambili ngexesha langempela kwinkqubo yokugquma, ezinje ngobukhulu befilimu, izinga lokufaka, i-vacuum kunye nobushushu, ukuqinisekisa umgangatho wokugquma.
Iintlobo: kuquka i-quartz crystal microbalance, i-optical thickness monitor kunye ne-residual gas analyzer, njl.
Izixhobo zokukhusela:
Umsebenzi: Uqinisekisa ukhuseleko lwabaqhubi kunye nezixhobo kwiingozi ezibangelwa ngamaqondo obushushu aphezulu, iivolthi eziphezulu okanye iindawo zokukhupha umoya.
Izinto ezisetyenziswayo: Ziquka ii-gards, amaqhosha okuma ngexesha likaxakeka kunye nee-interlocks zokhuseleko, njl.
Shwankathela.
Izixhobo zokugquma nge-vacuum zifezekisa inkqubo yokufaka iifilimu ezibhityileyo ezikumgangatho ophezulu ngokusebenzisa umsebenzi odibeneyo wezi zinto. Ezi matshini zidlala indima ebalulekileyo ekulungiseleleni iifilimu ezibhityileyo ezibonakalayo, ze-elektroniki, zokuhombisa nezisebenzayo.
–Eli nqaku likhutshwe nguumenzi womatshini wokugquma nge-vacuumGuangdong Zhenhua
Ixesha leposi: Julayi-23-2024