Cov khoom siv ntawm cov khoom siv nqus tsev

Cov khoom siv nqus tsev feem ntau muaj ntau yam khoom tseem ceeb, txhua yam muaj nws txoj haujlwm tshwj xeeb, uas ua haujlwm ua ke kom ua tiav kev tso zaj duab xis zoo thiab sib npaug. Hauv qab no yog cov lus piav qhia txog cov khoom tseem ceeb thiab lawv cov haujlwm:

Cov Cheebtsam Tseem Ceeb
Lub tshuab nqus tsev:
Kev Ua Haujlwm: Muab ib puag ncig uas tsis muaj zog lossis muaj lub tshuab nqus tsev siab kom tiv thaiv cov khoom siv txheej kom tsis txhob cuam tshuam nrog cov pa phem thaum lub sijhawm ua pa lossis sputtering, kom ntseeg tau tias cov yeeb yaj kiab huv thiab zoo.
Cov Qauv: Feem ntau yog ua los ntawm cov hlau tsis xeb lossis txhuas uas muaj zog heev, kev tsim sab hauv xav txog kev faib cua thiab kev yooj yim ntawm kev tso cov khoom hauv qab.
Lub tshuab nqus tsev twj tso kua mis:
Kev Ua Haujlwm: Siv los tso cov roj tawm hauv lub tshuab nqus tsev kom ua tiav qib nqus tsev uas xav tau.
Hom: Xws li cov twj siv tshuab (piv txwv li cov twj rotary vane), cov twj turbomolecular, cov twj diffusion thiab cov twj ion.
Qhov chaw ua pa lossis qhov chaw sputtering:
Kev Ua Haujlwm: ua kom sov thiab ua kom cov khoom siv txheej txheem ua pa lossis plasma hauv lub tshuab nqus tsev.
Hom: suav nrog qhov chaw ua kom sov tsis kam, qhov chaw ua kom cov pa roj electron beam evaporation, qhov chaw magnetron sputtering thiab qhov chaw ua kom cov pa roj laser evaporation, thiab lwm yam.
Tus tuav substrate thiab lub tshuab tig:
Kev Ua Haujlwm: Tuav lub substrate thiab xyuas kom meej tias cov khoom siv txheej txheem sib npaug rau ntawm qhov chaw ntawm lub substrate los ntawm kev tig lossis oscillation.
KEV SIV: Feem ntau suav nrog cov clamps kho tau thiab cov txheej txheem tig / oscillating kom haum rau cov substrates ntawm ntau yam duab thiab qhov ntau thiab tsawg.
Lub zog muab hluav taws xob thiab kev tswj hwm:
Kev Ua Haujlwm: Muab lub zog rau qhov chaw evaporation, qhov chaw sputtering thiab lwm yam khoom siv, thiab tswj cov kev txwv ntawm cov txheej txheem txheej txheem xws li kub, nqus tsev thiab lub sijhawm.
Cheebtsam: Muaj xws li cov khoom siv fais fab, cov vaj huam sib luag tswj hwm, cov tshuab tswj hwm computer, thiab cov sensors saib xyuas.
Lub Tshuab Muab Roj (rau cov khoom siv txheej sputter):
Kev Ua Haujlwm: Muab cov pa roj inert (piv txwv li, argon) lossis cov pa roj reactive (piv txwv li, oxygen, nitrogen) los tswj cov plasma lossis koom nrog hauv kev tshuaj lom neeg los tsim cov zaj duab xis nyias tshwj xeeb.
Cheebtsam: Muaj xws li cov thooj roj, cov khoom tswj kev ntws, thiab cov kav xa roj.
Lub Tshuab Txias:
Kev Ua Haujlwm: txias qhov chaw evaporation, qhov chaw sputtering thiab lub tshuab nqus tsev kom tiv thaiv kev kub dhau.
Hom: suav nrog cov tshuab cua txias thiab cov tshuab cua txias, thiab lwm yam.
Kev saib xyuas thiab nrhiav pom:
Kev Ua Haujlwm: Kev saib xyuas lub sijhawm tiag tiag ntawm cov yam ntxwv tseem ceeb hauv cov txheej txheem txheej, xws li cov tuab ntawm zaj duab xis, tus nqi tso tawm, lub tshuab nqus tsev thiab qhov kub, kom ntseeg tau tias cov txheej zoo.
Hom: suav nrog quartz crystal microbalance, optical thickness monitor thiab residual gas analyzer, thiab lwm yam.
Cov khoom siv tiv thaiv:
Kev Ua Haujlwm: Xyuas kom muaj kev nyab xeeb ntawm cov neeg teb xov tooj thiab cov khoom siv los ntawm kev phom sij los ntawm qhov kub thiab txias siab, qhov hluav taws xob siab lossis qhov chaw nqus tsev.
Cov Cheebtsam: Muaj cov neeg tiv thaiv, cov nyees khawm nres thaum muaj xwm txheej ceev thiab cov xauv kev nyab xeeb, thiab lwm yam.
Sau luv luv.
Cov khoom siv nqus tsev ua kom tiav cov txheej txheem ntawm kev tso cov zaj duab xis nyias zoo los ntawm kev ua haujlwm sib koom ua ke ntawm cov khoom no. Cov tshuab no ua lub luag haujlwm tseem ceeb hauv kev npaj cov zaj duab xis nyias pom kev, hluav taws xob, kho kom zoo nkauj thiab ua haujlwm tau zoo.

– Tsab xov xwm no yog tso tawm los ntawmlub tshuab nqus tsev txheej tshuab chaw tsim khoomGuangdong Zhenhua