Zigawo za zida zophikira vacuum

Zipangizo zophikira vacuum nthawi zambiri zimakhala ndi zigawo zingapo zofunika, chilichonse chili ndi ntchito yakeyake, zomwe zimagwira ntchito mogwirizana kuti zikwaniritse bwino komanso mofanana filimu. Pansipa pali kufotokozera kwa zigawo zazikulu ndi ntchito zake:

Zigawo Zazikulu
Chipinda chotsukira mpweya:
Ntchito: Imapereka malo opanda mpweya wochepa kapena malo opanda mpweya wambiri kuti zinthu zophimba zisagwirizane ndi zinthu zodetsedwa ndi mpweya panthawi ya nthunzi kapena kutulutsa madzi, kuonetsetsa kuti filimuyo ndi yoyera komanso yabwino.
Kapangidwe: Kawirikawiri amapangidwa ndi chitsulo chosapanga dzimbiri kapena aluminiyamu yolimba kwambiri, kapangidwe ka mkati kamaganizira kufalikira kwa mpweya komanso kusavuta kwa malo osungiramo zinthu.
Dongosolo la pampu ya vacuum:
Ntchito: Amagwiritsidwa ntchito kupopera mpweya mkati mwa chipinda chotsukira mpweya kuti akwaniritse mulingo wofunikira wa vacuum.
Mitundu: Kuphatikizapo mapampu amakina (monga mapampu ozungulira okhala ndi mavavu), mapampu a turbomolecular, mapampu ofalitsa ndi mapampu a ion.
Gwero la nthunzi kapena gwero la kutulutsa madzi:
Ntchito: imatenthetsa ndi kuwononga zinthu zophimbazo kuti zipange nthunzi kapena plasma mu vacuum.
Mitundu: kuphatikizapo gwero lotenthetsera lolimba, gwero la evaporation la elektron beam, gwero la magnetron sputtering ndi gwero la evaporation la laser, ndi zina zotero.
Chogwirira cha substrate ndi njira yozungulira:
Ntchito: Imasunga gawo lapansi ndikuwonetsetsa kuti zinthu zokutirazo zikuyikidwa mofanana pamwamba pa gawo lapansi pozungulira kapena kugwedezeka.
NYUMBA: Nthawi zambiri zimakhala ndi zomangira zosinthika ndi njira zozungulira/zozungulira kuti zigwirizane ndi magawo amitundu ndi makulidwe osiyanasiyana.
Mphamvu ndi njira yowongolera:
Ntchito: Imapereka mphamvu ku gwero la nthunzi, gwero lotulutsa madzi ndi zida zina, ndipo imayang'anira magawo a njira yonse yophikira monga kutentha, vacuum ndi nthawi.
Zigawo: Zikuphatikizapo magetsi, mapanelo owongolera, makina owongolera makompyuta, ndi masensa owunikira.
Dongosolo Loperekera Mafuta (la zida zokutira za sputter):
Ntchito: Imapereka mpweya wosagwira ntchito (monga argon) kapena mpweya wochitapo kanthu (monga mpweya, nayitrogeni) kuti plasma ikhalebe kapena kuti igwire nawo ntchito ya mankhwala kuti ipange filimu yopyapyala.
Zigawo: Zikuphatikizapo masilinda a gasi, zowongolera kayendedwe ka madzi, ndi mapaipi operekera gasi.
Dongosolo Loziziritsira:
Ntchito: zimaziziritsa gwero la nthunzi, gwero lotulutsa madzi ndi chipinda chotsukira kuti zisatenthe kwambiri.
Mitundu: kuphatikiza makina oziziritsira madzi ndi makina oziziritsira mpweya, ndi zina zotero.
Njira yowunikira ndi kuzindikira:
Ntchito: Kuyang'anira nthawi yeniyeni magawo ofunikira mu ndondomeko yophimba, monga makulidwe a filimu, kuchuluka kwa malo, vacuum ndi kutentha, kuti zitsimikizire mtundu wa chophimba.
Mitundu: kuphatikiza quartz crystal microbalance, optical thickness monitor ndi residual gas analyzer, ndi zina zotero.
Zipangizo zodzitetezera:
Ntchito: Imaonetsetsa kuti ogwiritsa ntchito ndi zida zawo ndi otetezeka ku zoopsa zomwe zimachitika chifukwa cha kutentha kwambiri, ma voltage ambiri kapena malo opumira mpweya.
Zigawo: Zikuphatikizapo alonda, mabatani oyimitsa mwadzidzidzi ndi maloko otetezera, ndi zina zotero.
Chidule.
Zipangizo zophikira vacuum zimathandiza kuti mafilimu opyapyala apamwamba azigwiritsidwa ntchito mogwirizana ndi zinthuzi. Makinawa amagwira ntchito yofunika kwambiri pakukonzekera mafilimu opyapyala, amagetsi, okongoletsa komanso ogwira ntchito.

– Nkhaniyi yatulutsidwa ndiwopanga makina ophikira vacuumGuangdong Zhenhua