Imishini yokumboza ivacuum ngokuvamile yakhiwa izingxenye ezibalulekile ezimbalwa, ngayinye inomsebenzi wayo othize, ezisebenza ngekhonsathi ukuze kuzuzwe ukufakwa kwefilimu ngendlela ephumelelayo, efanayo. Ngezansi incazelo yezingxenye eziyinhloko nemisebenzi yazo:
Izingxenye Eziyinhloko
Igumbi le-vacuum:
Umsebenzi: Ihlinzeka ngendawo enengcindezi ephansi noma ene-vacuum ephezulu ukuze ivimbele okokumboza ukuthi kusabelane nokungcola okuphuma komoya ngesikhathi sokuhwamuka noma ukufafaza, iqinisekisa ubumsulwa nekhwalithi yefilimu.
Isakhiwo: Ivamise ukwenziwa ngamandla amakhulu, insimbi engagqwali noma i-aluminium, umklamo wangaphakathi ucabangela ukusatshalaliswa kokugeleza komoya kanye nokubeka kalula kwe-substrate.
Isistimu yephampu ye-vacuum:
Umsebenzi: Isetshenziselwa ukupompa igesi ngaphakathi kwegumbi lokuhlanza ukuze kufinyelele izinga elidingekayo le-vacuum.
Izinhlobo: Kubandakanya amaphampu ayimishini (isb. amaphampu e-rotary vane), amaphampu e-turbomolecular, amaphampu okusabalalisa kanye namaphampu e-ion.
Umthombo wokuhwamuka noma umthombo wokufafaza:
Umsebenzi: Kushisisa futhi kuhwamulise okokunamathelayo kwenze umhwamuko noma i-plasma endaweni engenalutho.
Izinhlobo: kufaka phakathi umthombo wokushisa wokumelana, umthombo wokuhwamuka kwe-electron beam, umthombo we-magnetron sputtering kanye nomthombo wokuhwamuka kwe-laser, njll.
Isibambi se-substrate nendlela yokuzungezisa:
Umsebenzi: Ibamba i-substrate futhi iqinisekise ukubekwa okufanayo kwento enamathelayo ebusweni be-substrate ngokuzungezisa noma ngokuzulazula.
UKWAKHIWA: Ngokuvamile kufaka phakathi izinsimbi ezilungisekayo kanye nezindlela ezizungezayo/ezizuzisayo ukuze kufakwe ama-substrates anomumo nosayizi abahlukene.
Ukunikezwa kwamandla kanye nesistimu yokulawula:
Umsebenzi: Inikeza amandla emthonjeni wokuhwamuka, umthombo wokufafaza nezinye izinto zokusebenza, futhi ilawula imingcele yenqubo yonke yokuhlanganisa njengezinga lokushisa, i-vacuum nesikhathi.
Izingxenye: Kufaka phakathi izinto ezinikezwa amandla, amaphaneli okulawula, amasistimu okulawula ekhompuyutha, nezinzwa zokuqapha.
I-Gas Supply System (yemishini yokufaka i-sputter):
Umsebenzi: Ihlinzeka ngamagesi angenayo (isb, i-argon) noma amagesi asebenzayo (isb, umoya-mpilo, i-nitrogen) ukuze kugcinwe i-plasma noma ukubamba iqhaza ekuphenduleni kwamakhemikhali ukuze kukhiqizwe ifilimu ethile ezacile.
Izingxenye: Kubandakanya amasilinda egesi, izilawuli zokugeleza, namapayipi okulethwa kwegesi.
Uhlelo Lokupholisa:
Umsebenzi: ukupholisa umthombo wokuhwamuka, umthombo wokufafaza kanye negumbi le-vacuum ukuvimbela ukushisa ngokweqile.
Izinhlobo: zihlanganisa izinhlelo zokupholisa amanzi kanye nezinhlelo zokupholisa umoya, njll.
Isistimu yokuqapha nokuhlonza:
Umsebenzi: Ukuqapha ngesikhathi sangempela amapharamitha abalulekile enqubweni yokumboza, njengokujiya kwefilimu, izinga lokubeka, i-vacuum nezinga lokushisa, ukuze kuqinisekiswe ikhwalithi yokumboza.
Izinhlobo: kufaka phakathi i-quartz crystal microbalance, i-optical thickness monitor kanye ne-residual gas analyzer, njll.
Imishini yokuzivikela:
Umsebenzi: Iqinisekisa ukuphepha kwabaqhubi namathuluzi ezingozini ezibangelwa amazinga okushisa aphezulu, ama-voltage aphezulu noma izindawo ezingenalutho.
Izingxenye: Kufaka onogada, izinkinobho zokumisa izimo eziphuthumayo nezikhiye zokuphepha, njll.
Fingqa.
Imishini yokufaka i-vacuum ibona inqubo yokufaka amafilimu amancanyana ekhwalithi ephezulu ngomsebenzi we-synergistic walezi zingxenye. Le mishini idlala indima ebalulekile ekulungiseleleni amafilimu amancane abonakalayo, e-elekthronikhi, okuhlobisa futhi asebenzayo.
-Le ndatshana ikhishwe nguumenzi womshini we-vacuum coatingI-Guangdong Zhenhua
Isikhathi sokuthumela: Jul-23-2024