Iqondo lobushushu bokumelana nefilimu yesinyithi iyahluka ngobunzima befilimu, iifilimu ezibhityileyo azilunganga, iifilimu ezishinyeneyo zilungile, kwaye iifilimu ezishinyeneyo ziyafana kodwa azifani nezixhobo ezininzi. Ngokuqhelekileyo, i-coefficient yokumelana nobushushu bokumelana nokutshintsha ukusuka kwi-negative ukuya kwi-positive njengoko ubukhulu befilimu bukhula ukuya kumashumi e-nanometers.
Ukongezelela, izinga lokunyuka komphunga lichaphazela i-coefficient yokushisa yokumelana neefilimu zetsimbi. Izinga lomphunga ophantsi olungiselelwe ngumaleko wefilimu ukhululekile, ii-electron ngaphaya komqobo wayo onokubakho kunye nokukwazi ukuvelisa i-conductivity buthathaka, kudityaniswa ne-oxidation kunye ne-adsorption, ngoko ke ixabiso lokumelana liphezulu, i-coefficient yokumelana nobushushu incinci, okanye imbi, kunye nokunyuka kwezinga lokuphuma komphunga, i-coefficient yokuxhathisa yokumelana notshintsho oluncinci ukusuka kwi-negative ukuya kwi-positive. Oku kungenxa yezinga eliphantsi lokunyuka kwefilimu elungiselelwe ngenxa ye-oxidation yeempawu ze-semiconductor, i-coefficient yokumelana nobushushu bexabiso elibi. Iifilimu ezilungiselelwe kwizinga eliphezulu lokunyuka kwe-evaporation zivame ukuba neempawu zetsimbi kwaye zine-coefficient yokumelana nobushushu obufanelekileyo.
Ekubeni ulwakhiwo lwefilimu lutshintsha ngokungaguqukiyo ngamaqondo obushushu, ukuxhathisa kunye nokumelana nobushushu bomlinganisi wefilimu kukwatshintsha kunye nobushushu bomaleko wokugquma ngexesha lokuphuma komphunga, kwaye ifilimu ibhityile, kokukhona itshintsha kakhulu. Oku kunokucatshangelwa ngenxa yeenguqu zeekhemikhali ezibangelwa ukufuduka kwakhona kunye nokwabiwa kwakhona kweengqungquthela zesiqithi esisondeleyo okanye ifilimu yesakhiwo se-tubular kwi-substrate, kunye nokuchithwa kwe-lattice, ukuchithwa kokungcola, ukuchithwa kwe-lattice defects, kunye ne-oxidation.
–Eli nqaku likhutshwa nguukwenziwa komatshini wokugqumar Guangdong Zhenhua
Ixesha lokuposa: Jan-18-2024