Isixhobo sokugquma ivacuum siqhele ukwenziwa ngamacandelo aphambili aliqela, ngalinye linomsebenzi walo okhethekileyo, elisebenza ngekonsathi ukufezekisa ukubekwa kwefilim ngendlela efanelekileyo, efanayo. Ngezantsi yinkcazo yamacandelo aphambili kunye nemisebenzi yawo:
Amacandelo Angundoqo
Igumbi lokufunxa:
Umsebenzi: Ubonelela ngoxinzelelo oluphantsi okanye oluphezulu lwe-vacuum ukuthintela izinto zokugquma ekuphenduleni ukungcola komoya ngexesha lokuphuma komphunga okanye ukutshiza, ukuqinisekisa ukucoceka kunye nomgangatho wefilimu.
Ulwakhiwo: Ngokuqhelekileyo zenziwe ngokuqina okuphezulu, insimbi engenasici okanye i-aluminium, ukuyila kwangaphakathi kuthathela ingqalelo ukuhanjiswa komoya kunye nokulula kokubekwa kwe-substrate.
Inkqubo yempompo yokufunxa:
Umsebenzi: Isetyenziselwa ukupompa igesi ngaphakathi kwegumbi lokucoca ukufezekisa inqanaba elifunekayo le-vacuum.
Iindidi: Kubandakanywa iimpompo zoomatshini (umz. iimpompo ze-rotary vane), iimpompo ze-turbomolecular, iimpompo zokusasaza kunye neepompo ze-ion.
Umthombo womphunga okanye umthombo wokuphalaza:
Umsebenzi: Ufudumeza kwaye ukhuphe izinto zokugquma ukuze zenze umphunga okanye iplasma kwindawo yokufunxa.
Iindidi: kubandakanya umthombo wokufudumeza wokuxhathisa, umthombo we-electron beam evaporation, umthombo we-magnetron sputtering kunye ne-laser evaporation source, njl.
Isibambi sesubstrate kunye nesixhobo sokujikeleza:
Umsebenzi: Ubamba i-substrate kunye nokuqinisekisa ukuchithwa okufanayo kwezinto zokugubungela kumphezulu we-substrate ngokujikeleza okanye i-oscillation.
UKWAKHIWA: Ngokuqhelekileyo kubandakanya ii-clamps ezihlengahlengiswayo kunye neendlela ezijikelezayo / ezijikelezayo ukulungiselela i-substrates yeemilo ezahlukeneyo kunye nobukhulu.
Ubonelelo lwamandla kunye nenkqubo yokulawula:
Umsebenzi: Ibonelela ngamandla kumthombo wokuphuphuma kwamanzi, umthombo wokutshiza kunye nezinye izixhobo, kwaye ilawula iiparamitha zenkqubo yokugquma iyonke efana nobushushu, ivacuum kunye nexesha.
Amacandelo: Ibandakanya izixhobo zombane, iiphaneli zolawulo, iinkqubo zolawulo lwekhompyutha, kunye nezinzwa zokubeka iliso.
Inkqubo yoNikezo lwerhasi (yezixhobo zokugquma i-sputter):
Umsebenzi: Ibonelela ngeegesi ezingenayo (umzekelo, i-argon) okanye iigesi ezisebenzayo (umzekelo, i-oksijini, i-nitrogen) ukugcina i-plasma okanye ukuthatha inxaxheba kwi-chemical reaction ukuze kuveliswe ifilimu ethile ebhityileyo.
Amacandelo: Ibandakanya iisilinda zerhasi, izilawuli zokuqukuqela, kunye nemibhobho yokuhanjiswa kwegesi.
Inkqubo yokupholisa:
Umsebenzi: Ukupholisa umthombo wokuphuphuma kwamanzi, umthombo wokutshiza kunye negumbi lokufunxa ukunqanda ukutshisa.
Iindidi: zibandakanya iinkqubo zokupholisa amanzi kunye neenkqubo zokupholisa umoya, njl.
Inkqubo yokubeka iliso kunye nokufumanisa:
Umsebenzi: Ukujongwa kwexesha langempela kwiiparitha eziphambili kwinkqubo yokugquma, njengobunzima befilimu, izinga lokubeka, i-vacuum kunye nobushushu, ukuqinisekisa umgangatho wokugquma.
Iindidi: kubandakanywa i-quartz crystal microbalance, i-monitor ye-optical thickness kunye ne-residual analyzer yegesi, njl.
Izixhobo ezikhuselayo:
Umsebenzi: Uqinisekisa ukhuseleko lwabasebenzi kunye nezixhobo kwiingozi ezibangelwa ngamaqondo obushushu aphezulu, amandla ombane aphezulu okanye indawo yokufunxa.
Amacandelo: Kubandakanya abalindi, amaqhosha okumisa unxunguphalo kunye ne-interlocks yokhuseleko, njl.
Shwankathela.
Izixhobo zokugquma ivacuum ziyayiqonda inkqubo yokufaka iifilimu ezikumgangatho ophezulu ezibhityileyo ngomsebenzi we-synergistic wala macandelo. Aba matshini badlala indima ebalulekileyo ekulungiseleleni iifilimu ezibonakalayo, ze-elektroniki, zokuhombisa kunye nezisebenzayo.
-Eli nqaku likhutshwe nguumenzi womatshini wokugqumaGuangdong Zhenhua
Ixesha lokuposa: Jul-23-2024