Direct ion beam deposition ke mofuta oa ion beam e thusang deposition. Sebaka se otlolohileng sa ion beam ke sebaka se sa arohaneng ka bongata. Mokhoa ona o ile oa sebelisoa ka lekhetlo la pele ho hlahisa lifilimi tsa carbon tse kang daemane ka 1971, ho latela molao-motheo oa hore karolo e ka sehloohong ea cathode le anode ea mohloli oa ion e entsoe ka carbon.
Khase e utloahalang e isoa ka kamoreng ea ho tsoa, 'me matla a khoheli a ka ntle a eketsoa ho etsa hore plasma e tsoe tlas'a maemo a tlaase a khatello, ho itšetlehile ka phello ea sputtering ea li-ion ho li-electrode ho hlahisa li-ion tsa carbon. Li-ion tsa khabone le li-ion tse teteaneng ka har'a plasma li ile tsa kengoa ka phaposing ea deposition ka nako e le 'ngoe, 'me tsa potlakisoa hore li kenngoe substrate ka lebaka la khatello e mpe ea leeme holim'a substrate.
Liphetho tsa liteko li bontša hore li-ion tsa carbon tse nang le matla a 50 ~ 100eV hokamoremocheso, ka Si, NaCI, KCI, Ni le tse ling tse substrates mabapi le ho lokisetsa pepeneneng taemane-joaloka k'habone filimi, resistivity phahameng ka 10Q-cm, refractive index ea hoo e ka bang 2, insoluble ka inorganic le asiti manyolo, na le boima bo phahameng haholo.
——Sengoliloeng sena se lokollotsoe kemoetsi oa mochine oa vacuum coatingGuangdong Zhenhua
Nako ea poso: Aug-31-2023