Lisebelisoa tsa ho roala li-vacuum hangata li entsoe ka likarolo tse 'maloa tsa bohlokoa, e' ngoe le e 'ngoe e na le ts'ebetso ea eona e ikhethileng, e sebetsang ka konsarete ho fihlela ts'ebetso e ts'oanang ea filimi. Ka tlase ke tlhaloso ea likarolo tse kholo le mesebetsi ea tsona:
Likaroloana tse ka Sehloohong
Kamore ea vacuum:
Mosebetsi: E fana ka tikoloho e nang le khatello e tlaase kapa e phahameng ea vacuum ho thibela lisebelisoa tsa ho roala hore li se ke tsa sebetsana le litšila tse tsoang moeeng nakong ea mouoane kapa ho fafatsa, ho netefatsa bohloeki le boleng ba filimi.
Sebopeho: Hangata e entsoe ka matla a phahameng, tšepe e sa hloekang kapa aluminium, moralo oa ka hare o nahanela kabo ea moea le boiketlo ba ho behoa ha substrate.
Sistimi ea pompo ea vacuum:
Mosebetsi: E sebelisoa ho pompa khase ka har'a phaposi ea vacuum ho fihlela boemo bo hlokahalang ba vacuum.
Mefuta: Ho kenyeletsoa lipompo tsa mochini (mohlala, lipompo tsa rotary vane), lipompo tsa turbomolecular, lipompo tsa phallo le lipompo tsa ione.
Mohloli oa mouoane kapa mohloli oa sputtering:
Mosebetsi: Ho futhumatsa le ho etsa mouoane lintho tse koahelang ho etsa mouoane kapa plasma sebakeng se se nang letho.
Mefuta: ho kenyelletsa mohloli oa ho futhumatsa ho hanyetsa, mohloli oa elektrone beam evaporation, mohloli oa magnetron sputtering le mohloli oa laser evaporation, joalo-joalo.
Sets'oants'o sa substrate le mochini o potolohang:
Mosebetsi: E ts'oara substrate mme e netefatsa ho beoa ho tšoanang ha thepa ea ho roala holim'a substrate ka ho potoloha kapa ho oscillation.
KAHO: Ka tloaelo e kenyelletsa li-clamp tse feto-fetohang le mekhoa e potolohang / e oscillating ho amohela li-substrates tsa libopeho le boholo bo fapaneng.
Sistimi ea phepelo ea motlakase le taolo:
Mosebetsi: E fana ka matla ho mohloli oa mouoane, mohloli oa sputtering le lisebelisoa tse ling, 'me e laola mekhoa ea ho koahela ka kakaretso joalo ka mocheso, vacuum le nako.
Likaroloana: E kenyelletsa lisebelisoa tsa motlakase, liphanele tsa taolo, lisebelisoa tsa taolo ea komporo, le li-sensor tsa ho lekola.
Sistimi ea Phepelo ea Khase (bakeng sa lisebelisoa tsa ho roala ka sputter):
Mosebetsi: E fana ka likhase tse sa sebetseng (mohlala, argon) kapa likhase tse sebetsang (mohlala, oksijene, naetrojene) ho boloka plasma kapa ho kenya letsoho tšebetsong ea lik'hemik'hale ho hlahisa filimi e itseng e tšesaane.
Likaroloana: E kenyelletsa lisilindara tsa khase, lilaoli tsa phallo, le liphaephe tsa phepelo ea khase.
Sistimi ea ho Pholisa:
Mosebetsi: e pholisa mohloli oa moea oa mouoane, mohloli oa sputtering le vacuum room ho thibela mocheso o feteletseng.
Mefuta: kenyeletsa tsamaiso ea ho pholisa metsi le mekhoa ea ho pholisa moea, joalo-joalo.
Sistimi ea ho lekola le ho lemoha:
Mosebetsi: Tlhokomelo ea nako ea 'nete ea liparamente tsa bohlokoa ts'ebetsong ea ho roala, joalo ka botenya ba filimi, sekhahla sa deposition, vacuum le mocheso, ho netefatsa boleng ba ho roala.
Mefuta: ho kenyeletsoa quartz crystal microbalance, optical thickness monitoring le residual gase analyzer, joalo-joalo.
Lisebelisoa tsa ts'ireletso:
Mosebetsi: E netefatsa polokeho ea li-operators le lisebelisoa likotsing tse bakoang ke mocheso o phahameng, matla a phahameng a motlakase kapa tikoloho ea vacuum.
Likaroloana: E kenyelletsa balebeli, likonopo tsa ho emisa ts'ohanyetso le li-interlock tsa polokeho, jj.
Akaretsa.
Lisebelisoa tsa ho roala li-vacuum li hlokomela mokhoa oa ho kenya lifilimi tse tšesaane tsa boleng bo holimo ka mosebetsi oa synergistic oa likarolo tsena. Mechini ena e phetha karolo ea bohlokoa ho lokiseng lifilimi tse tšesaane tsa optical, elektroniki, tse khabisitsoeng le tse sebetsang hantle.
-Sengoliloeng sena se lokolloa kemoetsi oa mochine oa vacuum coatingGuangdong Zhenhua
Nako ea poso: Jul-23-2024