Zvizhinji zvemakemikari zvinhu zvinogona kupfaviswa nekuzvisanganisa nemapoka emakemikari, semuenzaniso Si inosanganidzana neH kuita SiH4, uye Al inosanganiswa neCH3 kuita Al(CH3). Muchirongwa cheCVD chinopisa, magasi ari pamusoro apa anotora humwe huwandu hwesimba rinopisa pavanenge vachipfuura nepakati inopisa uye vanoumba mapoka anogadzirisa, akadai seCh3 uye AL (CH3) 2, nezvimwewo. Vanobva vabatanidza pamwe chete kuti vagadzire mapoka ekugadzirisa, ayo anobva aiswa pa substrate. Zvadaro, ivo vanosanganiswa pamwe chete uye vanoiswa semafirimu matete. Panyaya yePECVD, kudhumhana kwema electrons, anergetic particles uye gas-phase molecules muplasma inopa simba rekuita rinodiwa kuti riumbe aya mapoka emakemikari anoshanda.
Zvakanakira zvePECVD zvinonyanya mune zvinotevera zvinhu:
(1) Kudzikira kwekushisa kwemaitiro kana kuenzaniswa neyakajairwa kemikari vapor deposition, iyo inonyanya kukonzerwa neplasma activation yezvimedu zvinogadziriswa panzvimbo peyakajairwa kudziyisa activation;
(2) Zvakafanana neyakajairwa CVD, yakanaka kuputira-kutenderedza plating yefirimu layer;
(3) Kuumbwa kweiyo firimu layer inogona kudzorwa zvisina tsarukano kusvika pamwero mukuru, zvichiita kuti zvive nyore kuwana multilayer mafirimu;
(4) Kushushikana kwefirimu kunogona kudzorwa nepamusoro / yakaderera frequency kusanganisa tekinoroji.
-Chinyorwa ichi chakaburitswa navacuum coating machine mugadziriGuangdong Zhenhua
Nguva yekutumira: Kubvumbi-18-2024