Vacuum yekupotera michina inowanzo umbwa nezvikamu zvakakosha zvakati wandei, chimwe nechimwe chine basa rayo chairo, rinoshanda mukonsati kuti riwane kunyatsoita, yunifomu yekuisa firimu. Pazasi pane tsananguro yezvikamu zvikuru uye mabasa azvo:
Main Components
Vacuum chamber:
Basa: Inopa yakaderera-kudzvanywa kana yakakwira-vacuum nharaunda kudzivirira iyo yekuvhara zvinhu kubva pakuita nekusachena kwemhepo panguva yekubuda kana kuputika, kuve nechokwadi kuchena uye kunaka kwefirimu.
Chimiro: Kazhinji yakagadzirwa nepamusoro-simba, simbi isina tsvina kana aruminiyamu, dhizaini yemukati inorangarira kugoverwa kwemhepo uye kureruka kwekuisa substrate.
Vacuum pombi system:
Basa: Inoshandiswa kupomba gasi mukati mekamuri yekutsvaira kuti uwane iyo inodiwa vacuum level.
Mhando: Kusanganisira mechanical pombi (eg rotary vane pombi), turbomolecular pombi, diffusion pombi uye ayoni pombi.
Evaporation source kana sputtering source:
Basa rekuita: rinopisa uye rinoputira zvinhu zvekuputira kuita mhute kana plasma muvacuum.
Mhando: zvinosanganisira kuramba kudziyisa sosi, electron beam evaporation sosi, magnetron sputtering sosi uye laser evaporation sosi, nezvimwe.
Substrate inobata uye inotenderera michina:
Basa: Inobata iyo substrate uye inova nechokwadi chekuiswa kwakafanana kwezvinhu zvekupfeka pamusoro peiyo substrate nekutenderera kana oscillation.
KUVAKWA: Kazhinji zvinosanganisira zvigadziriso zvinogadziriswa uye zvinotenderera / oscillating nzira dzekugadzirisa substrates dzemhando dzakasiyana uye saizi.
Simba rekupa uye control system:
Basa: Inopa simba kune evaporation sosi, sputtering sosi uye zvimwe zvishandiso, uye inodzora maparamendi ezvese coating process senge tembiricha, vacuum uye nguva.
Zvikamu: Inosanganisira magetsi emagetsi, mapaneru ekudzora, makomputa ekudzora masisitimu, uye ma sensors ekutarisa.
Gasi Supply System (ye sputter coating equipment):
Basa: Inopa magasi anert (eg, argon) kana magasi anoshanda (semuenzaniso, okisijeni, nitrogen) kuchengetedza plasma kana kutora chikamu mukuita kwemakemikari kugadzira firimu rakatetepa.
Zvikamu: Inosanganisira masilinda egasi, anoyerera anodzora, uye gasi rekutakura pombi.
Kutonhodza System:
Basa: inotonhodza iyo evaporation sosi, sputtering sosi uye vacuum kamuri kudzivirira kupisa.
Mhando: zvinosanganisira kutonhora kwemvura masisitimu uye mhepo inotonhorera masisitimu, nezvimwe.
Monitoring uye yekuona system:
Basa: Chaiyo-nguva yekutarisisa yeakakosha ma paramita mukuita kwekuputira, senge firimu ukobvu, deposition rate, vacuum uye tembiricha, kuve nechokwadi chekupfeka.
Mhando: kusanganisira quartz crystal microbalance, optical ukobvu yekutarisa uye yakasara gasi analyzer, nezvimwe.
Zvidziviriro:
Basa: Inochengetedza kuchengetedzwa kwevashandisi nemidziyo kubva munjodzi dzinokonzerwa nekupisa kwakanyanya, mavoltage akakwira kana nzvimbo dzevacuum.
Zvidimbu: Inosanganisira varindi, mabhatani ekumisa mbichana uye kuchengetedzwa kwemukati, nezvimwe.
Pfupisa.
Vacuum yekunamira michina inoona maitiro ekuisa emhando yepamusoro mafirimu matete kuburikidza nebasa re synergistic rezvikamu izvi. Michina iyi inoita basa rakakosha mukugadzirira kwemafirimu emaziso, emagetsi, ekushongedza uye anoshanda matete.
-Chinyorwa ichi chakaburitswa navacuum coating machine mugadziriGuangdong Zhenhua
Nguva yekutumira: Jul-23-2024