Plasma Yongerewe Imyuka Yumuyaga Umutwe 2

Ibintu byinshi bya chimique birashobora guhumeka ubihuza nitsinda ryimiti, urugero Si ikorana na H kugirango ikore SiH4, naho Al ikomatanya na CH3 ikora Al (CH3). Mubikorwa bya CVD yumuriro, imyuka yavuzwe haruguru ikurura ingufu zumuriro runaka mugihe zinyuze mumashanyarazi ashyushye hanyuma zigakora amatsinda akora nka CH3 na AL (CH3) 2, nibindi. Hanyuma bahuza hamwe kugirango bagire amatsinda akora, hanyuma ashyirwa kuri substrate. Ibikurikiraho, bahuza hamwe kandi babikwa nka firime zoroshye. Ku bijyanye na PECVD, kugongana kwa electron, ibice byingufu hamwe na molekile ya gaze ya plasma itanga imbaraga zo gukora zikenewe kugirango ayo matsinda yimiti yangiritse.

Ibyiza bya PECVD biri mubice bikurikira:

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(2) Kimwe na CVD isanzwe, kuzenguruka neza-isahani ya firime;

(3) Ibigize ibice bya firime birashobora kugenzurwa uko bishakiye murwego runini, byoroshye kubona firime nyinshi;

(4) Guhangayikishwa na firime birashobora kugenzurwa nubuhanga buhanitse / buke bwo kuvanga.

–Iyi ngingo yasohowe naimashini ikora imashiniGuangdong Zhenhua