Intangiriro Kuri Direct Ion Beam Deposition

Kubika ion beam itaziguye ni ubwoko bwa ion beam ifashwa kubitsa. Iyerekwa rya ion beam itaziguye ni idatandukanijwe na ion beam. Ubu buhanga bwakoreshejwe bwa mbere mu gukora firime ya karubone isa na diyama mu 1971, hashingiwe ku ihame ry'uko igice kinini cya cathode na anode y'inkomoko ya ion gikozwe muri karubone.

Gazi yumvikana ijyanwa mucyumba cyo gusohora, kandi hongeweho umurima wa magneti wo hanze kugirango utume plasma isohoka mugihe cyumuvuduko muke, bitewe ningaruka ziterwa na ion kuri electrode kugirango itange karubone. Iyoni ya karubone hamwe na ion zuzuye muri plasma zinjijwe mucyumba cyo kubitsa icyarimwe, kandi zihutishwa guterwa kuri substrate kubera umuvuduko mubi wo kubogama kuri substrate.

Ibisubizo by'ibizamini byerekana ko ion ya karubone ifite ingufu za 50 ~ 100eV kuriicyumbaubushyuhe, muri Si, NaCI, KCI, Ni nizindi substrate ku itegurwa rya firime ya karubone isa na diyama ibonerana, irwanya ubukana bugera kuri cm 10Q, indangagaciro zivunika zigera kuri 2, zidashonga muri acide organique na organic organique, zifite ubukana bwinshi cyane.

—— Iyi ngingo yasohowe naimashini ikora imashiniGuangdong Zhenhua