Ibigize ibikoresho byo gutwika vacuum

Ibikoresho byo gutwika Vacuum mubusanzwe bigizwe nibice byinshi byingenzi, buri kimwe gifite umurimo wacyo wihariye, gikorera hamwe kugirango kigere kuri firime neza. Hasi ni ibisobanuro byibice byingenzi nimirimo yabyo:

Ibyingenzi
Icyumba cya Vacuum:
Imikorere: Itanga umuvuduko muke cyangwa umuyaga mwinshi kugirango wirinde ko ibintu bitwikiriye bitagira ingaruka ku mwuka wo mu kirere mugihe cyo guhumeka cyangwa gusohora, byemeza ubwiza bwa firime.
Imiterere: Mubisanzwe bikozwe mu mbaraga nyinshi, ibyuma bidafite ingese cyangwa aluminium, igishushanyo mbonera cyita ku gukwirakwiza ikirere no koroshya gushyira substrate.
Sisitemu ya pompe ya vacuum:
Imikorere: Yifashishwa mu gusohora gaze imbere mucyumba cya vacuum kugirango ugere kurwego rukenewe.
Ubwoko: Harimo pompe ya mashini (urugero: pompe rotary vane pompe), pompe ya turbomolecular, pompe zo gukwirakwiza na pompe ion.
Inkomoko yumwuka cyangwa isoko yisoko:
Imikorere: gushyushya no guhumeka ibikoresho byo gutwikira kugirango bibe umwuka cyangwa plasma mumyuka.
Ubwoko: harimo ubushyuhe bwo gushyushya ibintu, isoko ya elegitoroniki yamashanyarazi, isoko ya magnetron hamwe nisoko ya laser, nibindi.
Substrate holder hamwe nuburyo bwo kuzunguruka:
Imikorere: Ifata substrate kandi ikemeza ko ibintu byose byashyizwe hejuru yububiko bwa rotate cyangwa kuzunguruka.
KUBAKA: Mubisanzwe harimo clamp zishobora guhindurwa hamwe nuburyo bwo kuzunguruka / kunyeganyega kugirango habeho substrate yuburyo butandukanye.
Sisitemu yo gutanga amashanyarazi no kugenzura:
Imikorere: Itanga imbaraga kumasoko yumwuka, isoko yisuka nibindi bikoresho, kandi ikagenzura ibipimo byimikorere rusange nkubushyuhe, vacuum nigihe.
Ibigize: Harimo ibikoresho byamashanyarazi, paneli yo kugenzura, sisitemu yo kugenzura mudasobwa, hamwe na sensor zo gukurikirana.
Sisitemu yo Gutanga Gazi (kubikoresho byo gutwikira sputter):
Imikorere: Gutanga imyuka ya inert (urugero, argon) cyangwa imyuka idahwitse (urugero, ogisijeni, azote) kugirango ibungabunge plasma cyangwa kugira uruhare mubitera imiti kugirango ikore firime yoroheje.
Ibigize: Harimo silindiri ya gaze, igenzura, hamwe nogutanga gaz.
Sisitemu yo gukonjesha:
Imikorere: ikonje inkomoko yumwuka, isoko yisuka hamwe nicyumba cya vacuum kugirango wirinde ubushyuhe bwinshi.
Ubwoko: shyiramo sisitemu yo gukonjesha amazi hamwe na sisitemu yo gukonjesha ikirere, nibindi.
Sisitemu yo gukurikirana no gutahura:
Imikorere: Gukurikirana-igihe nyacyo ibipimo byingenzi mugikorwa cyo gutwikira, nkubunini bwa firime, igipimo cyo kubitsa, vacuum nubushyuhe, kugirango ubuziranenge bwiza.
Ubwoko: harimo quartz kristal ya microbalance, monitor yubugari bwa optique hamwe nisesengura rya gaze isigaye, nibindi.
Ibikoresho birinda:
Imikorere: Iremeza umutekano wabakoresha nibikoresho biva mubyago biterwa nubushyuhe bwinshi, voltage nyinshi cyangwa ibidukikije bya vacuum.
Ibigize: Harimo abarinzi, buto yo guhagarika byihutirwa no guhuza umutekano, nibindi.
Vuga muri make.
Ibikoresho byo gutwika Vacuum bimenya inzira yo kubitsa amafirime meza yo mu rwego rwo hejuru binyuze mumirimo yo guhuza ibice. Izi mashini zigira uruhare runini mugutegura firime optique, electronique, imitako kandi ikora.

–Iyi ngingo yasohowe naimashini ikora imashiniGuangdong Zhenhua