Kuyika kwa Mpweya wa Mankhwala Owonjezera a Plasma Mutu 2

Mankhwala ambiri amatha kutenthedwa powaphatikiza ndi magulu a mankhwala, mwachitsanzo Si imakumana ndi H kupanga SiH4, ndipo Al imaphatikizana ndi CH3 kupanga Al(CH3). Mu ndondomeko yotentha ya CVD, mipweya yomwe ili pamwambayi imatenga mphamvu yochuluka ya kutentha pamene ikudutsa mugawo laling'ono lotentha ndikupanga magulu ogwira ntchito, monga CH3 ndi AL (CH3) 2, etc. Kenako amaphatikizana wina ndi mzake kuti apange magulu ogwira ntchito, omwe amaikidwa pa gawo lapansi. Pambuyo pake, amaphatikizana wina ndi mzake ndipo amayikidwa ngati mafilimu oonda. Pankhani ya PECVD, kugunda kwa ma electron, tinthu tating'onoting'ono ndi ma molekyulu a gasi-gawo mu plasma kumapereka mphamvu yoyambitsa yomwe ikufunika kuti ipange magulu a mankhwala osokoneza bongo.

Ubwino wa PECVD uli makamaka muzinthu izi:

(1) M'munsi ndondomeko kutentha poyerekeza ochiritsira mankhwala nthunzi mafunsidwe, amene makamaka chifukwa plasma kutsegula kwa zotakasika particles m'malo ochiritsira Kutentha kutsegula;

(2) Zofanana ndi CVD wamba, kukulunga mozungulira kuzungulira filimu yosanjikiza;

(3) Mapangidwe a filimuyo amatha kuyendetsedwa mopanda malire, zomwe zimapangitsa kuti zikhale zosavuta kupeza mafilimu ambiri;

(4) Kupsinjika kwamakanema kumatha kuwongoleredwa ndiukadaulo wapamwamba / wotsika pafupipafupi wosakanikirana.

-Nkhaniyi yatulutsidwa ndiwopanga makina opangira vacuumGuangdong Zhenhua