Ngwa mkpuchi oghere na-enwekarị ọtụtụ isi ihe, nke ọ bụla nwere ọrụ nke ya, nke na-arụ ọrụ na egwu iji rụpụta ihe nkiri na-arụ ọrụ nke ọma na otu. N'okpuru bụ nkọwa nke ihe ndị bụ isi na ọrụ ha:
Isi ihe
Ụlọ oghere:
Ọrụ: Na-enye ebe dị ala ma ọ bụ ikuku dị elu iji gbochie ihe mkpuchi ahụ ka ọ ghara ime ihe na-adịghị mma nke ikuku n'oge evaporation ma ọ bụ sputtering, na-achọpụta na ịdị ọcha na ịdị mma nke ihe nkiri ahụ.
Ihe owuwu: A na-ejikarị ike dị elu, igwe anaghị agba nchara ma ọ bụ aluminom, ime ime ime na-eburu n'uche nkesa ikuku na ịdị mfe nke ntinye mkpụrụ.
Sistemụ mgbapụta Vacuum:
Ọrụ: A na-eji amịpụta gas n'ime oghere oghere iji nweta ọkwa oghere achọrọ.
Ụdị: Gụnyere nfuli igwe (dịka nfuli rotary vane), nfuli turbomolecular, nfuli mgbasa na nfuli ion.
Isi iyi evaporation ma ọ bụ isi iyi sputtering:
Ọrụ: na-ekpo ọkụ ma na-ekpochapụ ihe mkpuchi ahụ iji mepụta vepo ma ọ bụ plasma n'ime oghere.
Ụdị: gụnyere iguzogide ikpo ọkụ, isi iyi evaporation electron, magnetron sputtering source na laser evaporation source, wdg.
Ihe njide mkpụrụ na usoro ntụgharị:
Arụ ọrụ: Na-ejide mkpụrụ ma na-eme ka ntinye nke ihe mkpuchi ahụ dị n'elu ala site na ntụgharị ma ọ bụ oscillation.
Mwube: Ọ na-agụnyekarị mkpọchi nwere ike imegharị na usoro ntụgharị / oscillating iji nabata mkpụrụ nke ụdị na nha dị iche iche.
Sistemụ ọkọnọ na njikwa ike:
Ọrụ: Na-enye ike na isi iyi evaporation, isi iyi na akụrụngwa ndị ọzọ, na-achịkwa paramita nke usoro mkpuchi n'ozuzu dịka okpomọkụ, oghere na oge.
Akụkụ: Gụnyere akụrụngwa ọkụ, ogwe njikwa, sistemu njikwa kọmputa, na ihe mmetụta nlekota.
Sistemụ Nkwanye Gas (maka akụrụngwa mkpuchi sputter):
Ọrụ: Na-enye gas inert (dịka ọmụmaatụ, argon) ma ọ bụ gas na-emeghachi omume (dịka ọmụmaatụ, oxygen, nitrogen) iji kwado plasma ma ọ bụ isonye na mmeghachi omume kemịkalụ iji mepụta fim dị mkpa.
Akụkụ: Gụnyere gas cylinders, ndị na-ahụ maka ịgbasa, na ọkpọkọ nnyefe gas.
Sistemu jụrụ oyi:
Ọrụ: na-eme ka isi iyi evaporation dị jụụ, isi iyi na-agbasa na oghere oghere iji gbochie ikpo oke ọkụ.
Ụdị: gụnyere usoro mmiri jụrụ oyi na ikuku jụrụ oyi, wdg.
Sistemu nlekota na nchọpụta:
Ọrụ: Nleba anya n'ezie nke isi ihe dị na usoro mkpuchi, dị ka ọkpụrụkpụ ihe nkiri, ọnụego ntinye, oghere na okpomọkụ, iji hụ na mkpuchi mkpuchi.
Ụdị: gụnyere quartz kristal microbalance, optical thick monitor and residual gas analyzer, wdg.
Ngwa nchekwa:
Ọrụ: Na-eme ka nchekwa nke ndị na-arụ ọrụ na akụrụngwa si n'ihe egwu kpatara oke okpomọkụ, nnukwu voltaji ma ọ bụ gburugburu oghere.
Ngwa: Gụnyere ndị nche, bọtịnụ nkwụsị ihe mberede na mkpuchi nchekwa, wdg.
Nchịkọta.
Ngwá ọrụ mkpuchi Vacuum na-achọpụta usoro nke itinye ihe nkiri dị mkpa dị elu site na ọrụ synergistic nke ihe ndị a. Igwe ndị a na-arụ ọrụ dị mkpa na nkwadebe nke ngwa anya, eletrọnịkị, ihe eji achọ mma na arụ ọrụ dị mkpa.
–E wepụtara akụkọ aonye na-emepụta igwe mkpuchi ikukuGuangdong Zhenhua
Oge nzipu: Jul-23-2024