Hlau zaj duab xis kuj kub coefficient ntawm kuj sib txawv nrog cov thickness ntawm zaj duab xis, nyias zaj duab xis yog tsis zoo, tuab films yog zoo, thiab thicker films yog zoo sib xws tab sis tsis zoo tib yam rau tej ntaub ntawv. Feem ntau, qhov kub tsis kam coefficient ntawm kev tiv thaiv hloov ntawm qhov tsis zoo mus rau qhov zoo vim tias cov yeeb yaj kiab thickness nce mus rau kaum nanometers.
Tsis tas li ntawd, tus nqi evaporation kuj cuam tshuam rau qhov kub thiab txias coefficient ntawm cov yeeb yaj kiab hlau. Tsawg evaporation tus nqi npaj los ntawm cov zaj duab xis txheej yog xoob, cov electrons thoob plaws nws lub peev xwm barrier thiab lub peev xwm los tsim conductivity yog tsis muaj zog, ua ke nrog oxidation thiab adsorption, yog li tus nqi kuj yog siab, cov kuj kub coefficient yog me me, los yog txawm tsis zoo, nrog rau qhov nce nyob rau hauv lub evaporation tus nqi, kuj kub coefficient ntawm cov kuj ntawm ib tug me me hloov ntawm loj, los ntawm tsis zoo mus rau qhov zoo. Qhov no yog vim qhov tsawg evaporation tus nqi ntawm zaj duab xis npaj vim oxidation ntawm cov khoom semiconductor, kuj kub coefficient ntawm qhov tsis zoo. Cov yeeb yaj kiab tau npaj rau ntawm qhov siab evaporation zoo li muaj cov khoom siv hlau thiab muaj qhov zoo tiv thaiv kub coefficient.
Txij li cov qauv ntawm cov zaj duab xis hloov irreversibly nrog kub, qhov kuj thiab kuj kub coefficient ntawm cov zaj duab xis kuj hloov nrog kub ntawm txheej txheej thaum evaporation, thiab lub thinner zaj duab xis, qhov ntau drastic hloov. Qhov no tuaj yeem xav tau los ntawm kev hloov tshuaj lom neeg los ntawm kev rov evaporation thiab redistribution ntawm thaj tsam ntawm cov kob los yog tubular qauv zaj duab xis ntawm lub substrate, nrog rau cov lattice scattering, impurity scattering, tawg ntawm lattice defects, thiab oxidation.
– Zaj lus no yog tso tawm los ntawmlub tshuab nqus tsev txheej tshuab tsimr Guangdong Zhenhua
Post lub sij hawm: Jan-18-2024