Cov cuab yeej siv lub tshuab nqus tsev feem ntau yog tsim los ntawm ob peb lub ntsiab lus tseem ceeb, txhua tus muaj nws tus kheej ua haujlwm tshwj xeeb, uas ua haujlwm hauv kev hais kwv txhiaj kom ua tiav cov yeeb yaj kiab zoo ib yam. Hauv qab no yog cov lus piav qhia ntawm cov khoom tseem ceeb thiab lawv txoj haujlwm:
Cov Cheebtsam
Lub tshuab nqus tsev vacuum:
Kev Ua Haujlwm: Muab qhov chaw tsis tshua muaj siab lossis lub tshuab nqus tsev siab los tiv thaiv cov khoom txheej los ntawm kev ua pa nrog cov pa phem thaum lub sij hawm evaporation los yog sputtering, kom ntseeg tau tias purity thiab zoo ntawm zaj duab xis.
Structure: Feem ntau yog ua los ntawm high-lub zog, stainless hlau los yog txhuas, lub sab hauv tsim yuav siv sij hawm mus rau hauv tus account airflow faib thiab yooj yim ntawm substrate tso.
Lub tshuab nqus tsev twj tso kua mis:
Function: Siv los tso cov pa tawm hauv lub tshuab nqus tsev kom ua tiav qib nqus tsev.
Hom: suav nrog cov twj siv tshuab (xws li cov twj tso kua mis teb), turbomolecular twj, diffusion twj thiab ion twj.
Evaporation qhov chaw los yog sputtering qhov chaw:
Muaj nuj nqi: heats thiab evaporates cov khoom txheej los ua ib qho vapor lossis plasma hauv lub tshuab nqus tsev.
Hom: suav nrog cov cua kub tsis kam, hluav taws xob hluav taws xob evaporation qhov chaw, magnetron sputtering qhov chaw thiab laser evaporation qhov chaw, thiab lwm yam.
Substrate tuav thiab rotating mechanism:
Muaj nuj nqi: Tuav lub substrate thiab ua kom zoo ib yam deposition ntawm cov khoom txheej ntawm lub substrate los ntawm kev sib hloov los yog oscillation.
CONSTRUCTION: Feem ntau suav nrog adjustable clamps thiab rotating / oscillating mechanisms kom haum raws li substrates ntawm cov duab sib txawv thiab ntau thiab tsawg.
Fais fab mov thiab tswj system:
Muaj nuj nqi: Muab lub zog rau lub evaporation qhov chaw, sputtering qhov chaw thiab lwm yam khoom siv, thiab tswj tsis tau tag nrho cov txheej txheem txheej xws li kub, nqus tsev vacuum thiab lub sij hawm.
Cov Cheebtsam: suav nrog cov khoom siv hluav taws xob, tswj vaj huam sib luag, khoos phis tawj tswj hwm, thiab ntsuas ntsuas ntsuas.
Gas Supply System (rau sputter txheej khoom):
Muaj nuj nqi: Muab cov pa roj inert (xws li, argon) los yog cov pa roj reactive (xws li, oxygen, nitrogen) los tswj cov ntshav los yog koom nrog cov tshuaj tiv thaiv los tsim cov yeeb yaj kiab tshwj xeeb.
Cov Cheebtsam: suav nrog lub tog raj kheej roj, cov tswj dej ntws, thiab cov kav dej xa roj.
Cooling System:
Muaj nuj nqi: cools lub evaporation qhov chaw, sputtering qhov chaw thiab lub tshuab nqus tsev chamber los tiv thaiv overheating.
Hom: suav nrog dej txias tshuab thiab cua txias tshuab, thiab lwm yam.
Kev soj ntsuam thiab kuaj xyuas qhov system:
Muaj nuj nqi: Kev saib xyuas lub sijhawm ntawm qhov tseem ceeb ntawm cov txheej txheem txheej txheej, xws li cov yeeb yaj kiab thickness, qhov tso tawm tus nqi, lub tshuab nqus tsev thiab qhov kub thiab txias, kom ntseeg tau tias txheej txheej zoo.
Hom: suav nrog quartz siv lead ua microbalance, optical thickness saib thiab residual gas analyzer, thiab lwm yam.
Cov khoom siv tiv thaiv:
Kev Ua Haujlwm: Ua kom muaj kev nyab xeeb ntawm cov neeg ua haujlwm thiab cov khoom siv los ntawm kev puas tsuaj los ntawm qhov kub thiab txias, qhov hluav taws xob siab lossis qhov chaw nqus tsev.
Cov Cheebtsam: suav nrog cov neeg tiv thaiv, khawm nres thaum muaj xwm ceev thiab kev ruaj ntseg interlocks, thiab lwm yam.
Cov ntsiab lus.
Lub tshuab nqus tsev txheej cov cuab yeej paub txog cov txheej txheem ntawm kev tso cov yeeb yaj kiab zoo tshaj plaws los ntawm kev sib koom ua haujlwm ntawm cov khoom siv no. Cov tshuab no ua lub luag haujlwm tseem ceeb hauv kev npaj cov khoom siv kho qhov muag, hluav taws xob, kho kom zoo nkauj thiab ua haujlwm nyias.
– Zaj lus no yog tso tawm los ntawmtshuab nqus tsev txheej tshuab manufacturersGuangdong Zhenhua
Post lub sij hawm: Lub Xya hli ntuj-23-2024