Yawancin abubuwan sinadarai na iya zama turɓaya ta hanyar haɗa su da ƙungiyoyin sinadarai, misali Si yana amsawa da H don samar da SiH4, kuma Al ya haɗa da CH3 don samar da Al(CH3). A cikin tsarin CVD na thermal, waɗannan gas ɗin da ke sama suna ɗaukar wani adadin kuzari yayin da suke wucewa ta cikin zazzafan substrate kuma su samar da ƙungiyoyi masu amsawa, kamar CH3 da AL (CH3) 2, da sauransu. Bayan haka, suna haɗuwa da juna kuma ana adana su azaman fina-finai na bakin ciki. A cikin yanayin PECVD, karo na electrons, ɓangarorin kuzari da ƙwayoyin-lokacin gas a cikin plasma suna ba da kuzarin kunnawa da ake buƙata don samar da waɗannan ƙungiyoyin sinadarai masu amsawa.
Abubuwan da ke cikin PECVD galibi suna cikin abubuwan da ke biyowa:
(1) Ƙananan tsarin zafin jiki idan aka kwatanta da na al'ada sinadaran tururi jijiya, wanda shi ne yafi saboda plasma kunnawa barbashi reactive maimakon na al'ada dumama kunnawa;
(2) Daidai da CVD na al'ada, mai kyau kunsa-a kusa da plating na fim ɗin Layer;
(3) Za'a iya sarrafa abun da ke cikin fim ɗin fim ɗin ba tare da izini ba zuwa babban matsayi, yana sauƙaƙa samun fina-finai masu yawa;
(4) Ana iya sarrafa damuwa na fim ta hanyar fasaha mai girma / ƙananan mitar haɗuwa.
–An fitar da wannan labarininjin shafa injin injinGuangdong Zhenhua
Lokacin aikawa: Afrilu-18-2024