Kayan aikin shafe-shafe yawanci sun ƙunshi abubuwa masu mahimmanci da yawa, kowannensu yana da takamaiman aikinsa, waɗanda ke aiki tare don cimma ingantaccen, jigon fim iri ɗaya. A ƙasa akwai bayanin manyan abubuwan haɗin gwiwa da ayyukansu:
Babban abubuwan da aka gyara
Vacuum chamber:
Aiki: Yana ba da ƙananan matsa lamba ko yanayi mai mahimmanci don hana abin da ke rufewa daga amsawa tare da ƙazanta na iska a lokacin ƙaura ko sputtering, tabbatar da tsabta da ingancin fim din.
Tsarin: Yawancin lokaci an yi shi da ƙarfi mai ƙarfi, bakin karfe ko aluminum, ƙirar ciki tana la'akari da rarrabawar iska da sauƙi na sanya wuri.
Tsarin famfo injin famfo:
Aiki: Ana amfani da shi don fitar da iskar gas a cikin ɗakin injin don cimma matakin da ake buƙata.
Nau'i: Ciki har da famfunan inji (misali rotary vane famfo), famfo turbomolecular, fanfunan watsawa da famfo ion.
Tushen evaporation ko tushen sputtering:
Aiki: yana zafi da ƙafe kayan shafa don samar da tururi ko plasma a cikin injin.
Nau'ukan: ciki har da tushen juriya na dumama, tushen evaporation na lantarki, tushen sputtering magnetron da tushen ƙawancen Laser, da sauransu.
Mai riƙe da ƙasa da injin juyawa:
Aiki: Rike da substrate da kuma tabbatar da uniform ajiya na shafi kayan a saman da substrate ta juyawa ko oscillation.
GININA: Yawanci ya haɗa da madaidaitan ƙugiya da hanyoyin jujjuyawar /scillating don ɗaukar nau'ikan sifofi da girma dabam dabam.
Tsarin samar da wutar lantarki da tsarin sarrafawa:
Aiki: Yana ba da iko ga tushen ƙafe, tushen sputtering da sauran kayan aiki, kuma yana sarrafa sigogi na tsarin shafi gabaɗaya kamar zafin jiki, injin da lokaci.
Abubuwan da aka haɗa: Ya haɗa da samar da wutar lantarki, sassan sarrafawa, tsarin sarrafa kwamfuta, da na'urori masu auna firikwensin sa ido.
Tsarin Samar da Gas (don kayan shafa sputter):
Aiki: Yana ba da iskar gas mara amfani (misali, argon) ko iskar gas mai amsawa (misali, oxygen, nitrogen) don kula da plasma ko shiga cikin halayen sinadarai don samar da takamaiman fim na bakin ciki.
Abubuwan da aka haɗa: Ya haɗa da silinda gas, masu sarrafa kwarara, da bututun isar gas.
Tsarin sanyaya:
Aiki: yana sanyaya tushen ƙawancen ruwa, tushen sputtering da ɗakin ɗaki don hana zafi.
Nau'ukan: sun haɗa da tsarin sanyaya ruwa da tsarin sanyaya iska, da sauransu.
Tsarin sa ido da ganowa:
Aiki: Real-lokaci saka idanu na key sigogi a cikin shafi tsari, kamar fim kauri, ajiya kudi, injin da zafin jiki, don tabbatar da shafi ingancin.
Nau'o'i: gami da ma'auni crystal microbalance, duban kauri na gani da ragowar gas analyzer, da sauransu.
Na'urorin kariya:
Aiki: Yana tabbatar da amincin masu aiki da kayan aiki daga hatsarori da ke haifar da matsanancin zafi, matsanancin ƙarfin wuta ko mahalli.
Abubuwan da aka haɗa: Ya haɗa da masu gadi, maɓallan tsayawar gaggawa da maƙullan tsaro, da sauransu.
Takaita.
Vacuum shafi kayan aiki gane aiwatar da ajiya high quality-na bakin ciki fina-finai ta hanyar synergistic aiki na wadannan aka gyara. Wadannan injuna suna taka muhimmiyar rawa wajen shirya fina-finai na gani, lantarki, kayan ado da kayan aiki na bakin ciki.
–Wannan labarin ya fito dagainjin shafa injin injinGuangdong Zhenhua
Lokacin aikawa: Yuli-23-2024