Izinqubo zokumboza nge-vacuum—kufaka phakathi i-Physical Vapor Deposition (PVD), i-Magnetron Sputtering, kanye ne-Ion Plating—zisetshenziswa kabanzi kuma-optics, ezimotweni, kuma-electronics, nakumadivayisi ezokwelapha. Naphezu kwezinzuzo zazo ekukhiqizeni amafilimu amancane aqinile, anamathelayo, futhi asebenzayo, abakhiqizi bavame ukubhekana nezinkinga zokumboza eziphindaphindayo. Lezi zinkinga zithinta ngqo ukusebenza kwefilimu, isivuno sokukhiqiza, kanye nokuthembeka kwenqubo.
Lesi sihloko sifingqa amaphutha okumboza avame kakhulu kanye nezindlela zokumelana nobunjiniyela ezihambisanayo.
1. Ubukhulu befilimu obungalingani
Izimbangela Ezivamile:
I-geometry engalungile kusuka ku-target kuya ku-substrate
Ukunyakaza okunganele noma okungalungile kwe-substrate (ukujikeleza, ukunyakaza kwamaplanethi, noma ukuthuthwa okuqondile)
Ukwanda kobuningi be-plasma endaweni enkulu
Izixazululo Zobuchwepheshe:
Lungiselela ukwakheka kwe-cathode/target array ukuze kusatshalaliswe kangcono i-angular
Thuthukisa ukufakwa kwe-substrate kanye nokulawula ukunyakaza ukuze kulungiswe ukuhlukahluka kwendawo
Lungisa kahle ingcindezi yokusebenza, ukusatshalaliswa kwamandla, kanye nokucushwa kwensimu yamagnetic
2. Ukunamathela Okubi / Ukuhlukaniswa Kwefilimu
Izimbangela Ezivamile:
Ubuso be-substrate obungcolile (uwoyela osele, umswakama, noma ama-oxide emvelo)
Ukucindezeleka okuphezulu kwangaphakathi ngaphakathi kwesendlalelo esibekiwe
Ukuntuleka kwezingqimba ezikhuthaza ukunamathela
Izixazululo Zobuchwepheshe:
Qinisa ukwelashwa kwangaphambi kwe-substrate: ukuhlanzwa kwe-ultrasonic, ukugqwala kwe-plasma, noma ukubhomba kwe-ion
Lungisa i-voltage kanye nezinga lokushisa le-substrate ukuze unciphise ukunqwabelana kokucindezeleka
Faka izendlalelo zokunamathela eziphakathi nendawo njenge-Ti noma i-Cr ukuze uthuthukise ukubopha kwefilimu ne-substrate
3. Izimbobo Ezigobile Nokungcola Kwezinhlayiya
Izimbangela Ezivamile:
Ukungcola kwezinhlayiya ngaphakathi kwegumbi lokuhlanza
Ukugoba okuqondiwe noma ukuqhekeka kwendawo ngesikhathi sokutshiza
Ukubuyiselwa emuva komphunga kawoyela ovela ezinhlelweni zokupompa
Izixazululo Zobuchwepheshe:
Gcina izinqubo zokulayisha nokuphatha ezingeni lokuhlanza igumbi
Sebenzisa izithako ezihlanzekile kakhulu neziboshwe kahle ukuze unciphise ukukhafula nokuqhekeka
Lungisa amaphampu njalo bese ufaka izithiyo zamafutha noma ama-cryogenic baffles ukuze uvimbele ukungcola
4. Ukwehluleka Kokuqhekeka Noma Ukucindezeleka Kwefilimu
Izimbangela Ezivamile:
Ukucindezeleka okukhulu kwangaphakathi ezimbozweni ezijiyile
Ukungafani kokukhula kokushisa phakathi kokumbozwa kanye ne-substrate
Imijikelezo yokushisa/yokupholisa okusheshayo ebangela ukushaqeka kokushisa
Izixazululo Zobuchwepheshe:
Lawula ukujiya kwefilimu kanye nesilinganiso sokufakwa ukuze unciphise ukuqongelela kokucindezeleka
Dala izembozo ezinezingqimba eziningi noma ezilinganisiwe ukuze unciphise ukucindezeleka
Sebenzisa ukulinganisa izinga lokushisa okulawulwayo ngesikhathi semijikelezo yenqubo
5. Ukushintsha Kombala Nokungaguquguquki Kokukhanya
Izimbangela Ezivamile:
Ukuphambuka kobukhulu ekugqokeni kokuphazamiseka kokukhanya
Ukugeleza kwegesi esabelayo okungazinzile ngesikhathi sokugeleza kwegesi okusabelayo (O₂, N₂, njll.)
Ukuguquguquka kokunikezwa kwamandla noma ukungazinzi kwe-arc
Izixazululo Zobuchwepheshe:
Sebenzisa izinhlelo zokuqapha ezisendaweni (izikrini zekristalu ze-quartz, ukuqapha okubonakalayo)
Qinisa ukugeleza kwegesi usebenzisa izilawuli zokugeleza kwesisindo (ama-MFC)
Qinisekisa ukulethwa kwamandla okuzinzile ngokucindezela i-arc kanye nokulawula impendulo
Isiphetho
Ikhwalithi yengubo ye-vacuum ibucayi kakhulu ekulungisweni kwe-substrate, imingcele yenqubo, indawo yegumbi, kanye nokuqina kwemishini. Ngokubhekana ngokuhlelekile neziphambeko ezingenhla ngezixazululo ezisekelwe kubunjiniyela, abakhiqizi bangafeza okulandelayo:
Ukufana kwefilimu okuphezulu
Ukunamathela okuqinile nokuqina
Ukuphindaphindeka okuphezulu kuzo zonke izinhlobo zokukhiqiza
Ekugcineni, ukulawulwa okuqinile kweziphambeko kuqinisekisa ukuthi imikhiqizo embozwe nge-vacuum ihlangabezana nezidingo zokusebenza eziqinile zezimboni ze-optics, zezimoto, ze-elekthronikhi, kanye nezezokwelapha.
—Lesi sihloko sishicilelwe ngu imishini yokumboza nge-vacuumumenzi we-Zhenhua Vacuum
Isikhathi sokuthunyelwe: Septhemba-20-2025