Iinkqubo zokugquma nge-vacuum—kuquka i-Physical Vapor Deposition (PVD), i-Magnetron Sputtering, kunye ne-Ion Plating—zisetyenziswa kakhulu kwi-optics, kwiimoto, kwi-electronics, nakwizixhobo zonyango. Nangona ziluncedo ekuveliseni iifilimu ezixineneyo, ezinamathelayo, nezisebenzayo, abavelisi badla ngokujongana neziphene zokugquma eziphindaphindayo. Ezi ngxaki zichaphazela ngokuthe ngqo ukusebenza kwefilimu, imveliso, kunye nokuthembeka kwenkqubo.
Eli nqaku lishwankathela iziphene eziqhelekileyo zokugquma kunye neendlela zokumelana nezobunjineli ezifanelekileyo.
1. Ubukhulu beFilimu obungalinganiyo
Izizathu eziqhelekileyo:
I-geometry engalunganga ukusuka kwi-target ukuya kwi-substrate
Ukungahambelani kakuhle okanye okungachanekanga kwe-substrate (ukujikeleza, ukuhamba kweeplanethi, okanye ukuthuthwa okuthe tye)
Iigradients zoxinano lweplasma kwindawo enkulu
Izisombululo zobuGcisa:
Lungiselela uyilo lwe-cathode/target array ukuze usasazeke ngcono nge-angular
Ukuphucula ukufakelwa kwe-substrate kunye nolawulo lokuhamba ukuze kulungiswe utshintsho lwendawo
Lungisa uxinzelelo olusebenzayo, usasazo lwamandla, kunye noqwalaselo lwentsimi yamagnetic
2. Ukuncamathela okubi / Ukungabandakanywa kakuhle kwefilimu
Izizathu eziqhelekileyo:
Umphezulu we-substrate ongcolisiweyo (ioyile eseleyo, umswakama, okanye ii-oxides zasekhaya)
Uxinzelelo oluphezulu lwangaphakathi ngaphakathi komaleko obekwe
Ukungabikho kweendawo ezidibanisa izinto ezikhuthaza ukunamathela
Izisombululo zobuGcisa:
Qinisa unyango lwangaphambi kwe-substrate: ukucocwa kwe-ultrasonic, ukugrumba nge-plasma, okanye ukubhomba kwe-ion
Lungisa i-substrate bias voltage kunye nobushushu ukuze unciphise ukuqokelelana koxinzelelo
Faka iileya zokuncamathela eziphakathi ezifana neTi okanye iCr ukuphucula ukubopha kwefilimu ne-substrate
3. Iimingxuma kunye nongcoliseko lwamasuntswana
Izizathu eziqhelekileyo:
Ungcoliseko lwamasuntswana ngaphakathi kwigumbi lokufunxa i-vacuum
Ukujika okujolise kuko okanye ukuqhekeka komphezulu ngexesha lokutshiza
Ukusasazwa komphunga weoyile kwiinkqubo zokumpompa
Izisombululo zobuGcisa:
Gcina iindlela zokulayisha nokuphatha ezisemgangathweni kwigumbi lokucoca
Sebenzisa iithagethi ezicocekileyo neziqinileyo ukuze unciphise ukutshica nokuqhekeka
Lungisa iimpompo rhoqo kwaye ufake ii-oil traps okanye ii-cryogenic baffles ukuthintela ungcoliseko
4. Ukusilela kokuqhekeka okanye uXinzelelo lweFilimu
Izizathu eziqhelekileyo:
Uxinzelelo olugqithisileyo lwangaphakathi kwiingubo ezixineneyo
Ukungalingani kokwandiswa kobushushu phakathi kokwambathisa kunye nesiseko
Imijikelo yokufudumeza/yokupholisa ngokukhawuleza ebangela ukutshatyalaliswa kobushushu
Izisombululo zobuGcisa:
Ulawulo lwefilimu ubukhulu kunye nesantya sokufaka ukuze kuncitshiswe ukuqokelelwa koxinzelelo
Yila iingubo ezinemigangatho emininzi okanye ezikumgangatho ophezulu ukuze unciphise uxinzelelo
Sebenzisa uhlengahlengiso lobushushu olulawulwayo ngexesha lemijikelo yenkqubo
5. Ukutshintsha kombala kunye nokungangqinelani kokukhanya
Izizathu eziqhelekileyo:
Ukuphambuka kobukhulu kwiingubo zokuphazamiseka kwe-optical
Ukuhamba kwegesi ephendulayo okungazinzanga ngexesha lokutshiza okusabelayo (O₂, N₂, njl.njl.)
Ukuguquguquka kombane okanye ukungazinzi kwe-arc
Izisombululo zobuGcisa:
Sebenzisa iinkqubo zokubeka esweni ezikwindawo ethile (iimonitha zekristale ze-quartz, ukubeka esweni okubonakalayo)
Zinzisa ukuhamba kwegesi usebenzisa abalawuli bokuhamba kobuninzi (ii-MFC)
Qinisekisa ukunikezelwa kwamandla okuzinzileyo ngoxinzelelo lwe-arc kunye nolawulo lwempendulo
Isiphelo
Umgangatho we-vacuum coating ubuthathaka kakhulu ekulungisweni kwe-substrate, iiparameter zenkqubo, imeko yegumbi, kunye nokuzinza kwezixhobo. Ngokujongana neziphene ezingentla ngezisombululo ezisekelwe kubunjineli, abavelisi banokufezekisa oku kulandelayo:
Ukufana kwefilimu okugqwesileyo
Ukunamathela okuqinileyo kunye nokuqina
Ukuphinda-phinda okuphezulu kwiibhetshi zemveliso
Ekugqibeleni, ulawulo oluqinileyo lweziphene luqinisekisa ukuba iimveliso ezigqunywe nge-vacuum ziyahlangabezana neemfuno ezingqongqo zokusebenza kwe-optics, iimoto, izixhobo ze-elektroniki kunye nezoshishino zonyango.
—Eli nqaku lipapashwe ngu izixhobo zokugquma nge-vacuumumenzi we-Zhenhua Vacuum
Ixesha leposi: Septemba-20-2025