Mekhoa ea ho koahela ka vacuum—ho kenyeletsoa le ho tlosoa ha mouoane ka mokhoa oa 'mele (PVD), ho phunya ha Magnetron, le ho kenya li-Ion Plating—e sebelisoa haholo ho lisebelisoa tsa optic, likoloi, lisebelisoa tsa elektroniki le tsa bongaka. Ho sa tsotellehe melemo ea tsona ea ho hlahisa lifilimi tse teteaneng, tse khomarelang le tse sebetsang hantle, bahlahisi hangata ba tobana le liphoso tse pheta-phetoang tsa ho koahela. Mathata ana a ama ka kotloloho ts'ebetso ea filimi, chai ea tlhahiso le ts'epo ea ts'ebetso.
Sengoloa sena se akaretsa liphoso tse atileng haholo tsa ho roala le mehato e tsamaellanang ea boenjiniere.
1. Botenya ba Filimi bo sa Tšoaneng
Mabaka a Tloaelehileng:
Jeometri e sa nepahalang ea sepheo ho ea ho substrate
Ho se tsamaye ha substrate ho sa lekaneng kapa ho sa nepahalang (ho potoloha, ho tsamaea ha lipolanete, kapa ho tsamaisa ka mola)
Li-gradients tsa bongata ba plasma sebakeng se seholo sa ho bokellana ha metsi
Litharollo tsa Tekheniki:
Ntlafatsa moralo oa cathode/target array bakeng sa kabo e betere ea angular
Ntlafatsa ho lokisa substrate le taolo ea motsamao ho lefella liphetoho tsa sebaka seo
Lokisa khatello ea mosebetsi hantle, kabo ea matla, le tlhophiso ea matla a makenete
2. Ho Khomarela ho Fosahetseng / Ho Fokotsa Filimi
Mabaka a Tloaelehileng:
Bokaholimo ba substrate bo silafetseng (oli e setseng, mongobo, kapa li-oxide tsa tlhaho)
Khatello e phahameng ea ka hare ho lera le behiloeng
Ho hloka li-interlayers tse khothalletsang ho khomarela
Litharollo tsa Tekheniki:
Matlafatsa substrate pele ho kalafo: ho hlwekisa ka ultrasound, ho etching ka plasma, kapa ho phatloha ha ion
Fetola motlakase le mocheso oa leeme la substrate ho fokotsa ho bokellana ha khatello
Kenya dikarolo tse kgomarelang tse mahareng tse kang Ti kapa Cr ho ntlafatsa kgomarelo ya filimi le substrate
3. Likoti tse ka tlas'a le ho silafala ha likaroloana
Mabaka a Tloaelehileng:
Tšilafalo ea likaroloana ka hare ho kamore ea vacuum
Ho thiba kapa ho petsoha ha bokaholimo nakong ea ho phunya
Ho khutlisetsoa morao ha mouoane oa oli ho tsoa lits'ebetsong tsa ho pompa
Litharollo tsa Tekheniki:
Boloka melaoana ea ho kenya le ho sebetsana le eona e le boemong bo hloekileng ba kamore
Sebelisa lipheo tse hloekileng haholo, tse kopantsoeng hantle ho fokotsa ho tšoela le ho ntsha mathe
Kamehla lokisa lipompo 'me u kenye li-trap tsa oli kapa li-baffle tsa cryogenic ho thibela tšilafalo
4. Ho Hlōleha ha Khatello ea Maikutlo kapa ea Filimi
Mabaka a Tloaelehileng:
Khatello e feteletseng ea tlhaho ea liaparo tse teteaneng
Ho se tsamaisane ha katoloso ea mocheso pakeng tsa ho koahela le substrate
Lipotoloho tse potlakileng tsa ho futhumatsa/ho pholisa tse bakang ho tšoha ha mocheso
Litharollo tsa Tekheniki:
Taolo ea botenya ba filimi le sekhahla sa ho beha lintho ho fokotsa ho bokellana ha khatello ea maikutlo
Rala masela a nang le mekhahlelo e mengata kapa a maemo ho fokotsa khatello ea maikutlo
Kenya tšebetsong ho laola mocheso nakong ea potoloho ea ts'ebetso
5. Phetoho ea 'Mala le ho se Tsitse ha Optical
Mabaka a Tloaelehileng:
Ho kheloha ha botenya ho liphahlo tsa tšitiso ea optical
Phallo e sa tsitsang ea khase e arabelang nakong ea ho phatloha ha motlakase (O₂, N₂, jj.)
Ho feto-fetoha ha phepelo ea motlakase kapa ho se tsitse ha arc
Litharollo tsa Tekheniki:
Sebelisa litsamaiso tsa ho beha leihlo tse sebetsang sebakeng seo (li-monitor tsa kristale ea quartz, ho beha leihlo ka mahlo)
Tsitsisa phallo ea khase u sebelisa li-controller tsa phallo ea boima (MFCs)
Netefatsa hore motlakase o tswela pele ka ho thibela arc le taolo ya maikutlo
Qetello
Boleng ba sekoahelo sa vacuum bo ameha haholo ho lokisoeng ha substrate, liparamente tsa ts'ebetso, tikoloho ea kamore, le botsitso ba lisebelisoa. Ka ho sebetsana le liphoso tse kaholimo ka mokhoa o hlophisehileng ka litharollo tse thehiloeng boenjiniere, bahlahisi ba ka fihlela:
Ho tšoana ho phahameng ha filimi
Ho khomarela ho matla le ho tšoarella
Ho ikatisa hape haholo ho pholletsa le lihlopha tsa tlhahiso
Qetellong, taolo e matla ea liphoso e netefatsa hore lihlahisoa tse koahetsoeng ka vacuum li fihlela litlhoko tse thata tsa ts'ebetso ea optics, likoloi, lisebelisoa tsa elektroniki le tsa bongaka.
—Sengoloa sena se phatlalalitsoe ke lisebelisoa tsa ho roala ka vacuummoetsi oa Zhenhua Vacuum
Nako ea poso: Loetse-20-2025