Inenge zisanzwe mu gusiga irangi ry'ubushyuhe n'ibisubizo byazo bya tekiniki

Uburyo bwo gusiga irangi ry’umwuka—harimo Gusiga umwuka ushyushye (PVD), Magnetron Sputtering, na Ion Plating—bikoreshwa cyane mu byuma bikoresha optique, imodoka, ibikoresho by’ikoranabuhanga, n’ibikoresho by’ubuvuzi. Nubwo bifite akamaro mu gukora filime nini, zifata neza kandi zikora neza, abakora filime bakunze guhura n’ibibazo byo gusiga irangi kenshi. Ibi bibazo bigira ingaruka ku mikorere ya filime, umusaruro wayo, ndetse n’uburyo ikorwamo neza.

Iyi nkuru ivuga muri make inenge zikunze kugaragara mu gusiga irangi hamwe n'uburyo bwo guhangana n'ubuhanga bujyanye nabyo.

1. Ubunini bwa firime idasa

Impamvu zisanzwe:

Imiterere idakwiye y'icyerekezo kuva ku gice cyacyo cya mbere kugeza ku cya kabiri

Kudakora neza cyangwa kudakora neza ku buryo buhagije (kuzenguruka, kugenda kw'isi, cyangwa gutwara ibintu mu buryo bugororotse)

Ubucucike bwa plasma mu gice kinini cy'amazi

Ibisubizo bya tekiniki:

Ongera imiterere ya cathode/target array kugira ngo urusheho gukwirakwiza inguni neza

Kongera ubushobozi bwo gushyira ibintu ku butaka no kugenzura ubwikorezi kugira ngo bibe bisimbura ihinduka ry'aho hantu.

Gutunganya neza umuvuduko w'akazi, ikwirakwizwa ry'ingufu, n'imiterere y'umuvuduko wa rukuruzi

2. Gufata nabi filime / Guhindura filime

Impamvu zisanzwe:

Ubuso bwanduye bw'ubutaka (amavuta asigaye, ubushuhe, cyangwa ogiside gakondo)

Umuvuduko mwinshi w'imbere mu gice cyashyizwemo

Kutagira ibice bifasha mu gufatana kw'imigozi

Ibisubizo bya tekiniki:

Kongera imbaraga mu gutunganya substrate mbere yo kuyitunganya: gusukura hakoreshejwe ultrasound, gushushanya plasma, cyangwa gutema ion

Hindura ingufu n'ubushyuhe bya substrate kugira ngo ugabanye ubwiyongere bw'imihangayiko

Shyiramo ibice byo hagati bifatanye nka Ti cyangwa Cr kugira ngo wongere ubufatanye hagati ya filime n'ibice byayo.

3. Uduce tw'inyuma n'ubwandu bw'udukoko

Impamvu zisanzwe:

Udukoko twanduzanya imbere mu cyumba cy'imyanda

Gutera cyangwa gukubita ubuso mu gihe cyo gutera amacandwe

Gusubiza inyuma umwuka w'amavuta uva mu buryo bwo kuvoma

Ibisubizo bya tekiniki:

Gukomeza gahunda zo gushyira no gucunga ibikoresho mu cyumba cy'isuku

Koresha intego nziza kandi zifatanye neza kugira ngo ugabanye amacandwe n'ibisebe

Gusukura ipompo buri gihe no gushyiraho imitego y'amavuta cyangwa imiyoboro ikoresha amavuta kugira ngo hirindwe kwandura

4. Kunanirwa gucika cyangwa gucika intege mu buryo bwa firime

Impamvu zisanzwe:

Guhangayika cyane mu bice binini by'umubiri

Ubushyuhe budahuye hagati yo gusiga n'ubutaka

Gushyushya/gukonjesha vuba bitera guhungabana k'ubushyuhe

Ibisubizo bya tekiniki:

Genzura ubugari bwa firime n'umuvuduko wo kuyishyiramo kugira ngo ugabanye ukwiyongera kwa stress

Kora irangi ry'ibirahuri byinshi cyangwa rifite amanota menshi kugira ngo ugabanye stress

Shyira mu bikorwa uburyo bwo kugenzura ubushyuhe mu gihe cy'ibikorwa

5. Guhindura ibara no kudahuza kw'amabara

Impamvu zisanzwe:

Ubunini bw'ibice by'urumuri bivangavanze n'amatara

Ihindagurika ry'umwuka utera mu gihe cyo guhumeka (O₂, N₂, nibindi)

Ihindagurika ry'ingufu z'amashanyarazi cyangwa kudahuza kw'imirongo

Ibisubizo bya tekiniki:

Koresha sisitemu zo kugenzura ibintu mu buryo busanzwe (quartz crystal monitors, optical monitoring)

Gutuza urujya n'uruza rwa gaze hakoreshejwe ibikoresho bigenzura urujya n'uruza rw'umuvuduko w'amazi (MFCs)

Menya neza ko umuriro utangwa neza ukoresheje uburyo bwo gukumira arc no kugenzura uburyo bwo gusubiza ibitekerezo

Umwanzuro

Ubwiza bw'igitambaro cy'umwuka uva mu cyuma buterwa cyane n'itegurwa rya substrate, ibipimo by'imikorere, ibidukikije by'icyumba, n'ubudahangarwa bw'ibikoresho. Mu gukemura ibibazo byavuzwe haruguru hakoreshejwe ibisubizo bishingiye ku buhanga, abakora bashobora kugera kuri ibi bikurikira:

Ubuhanga bwo gukora filime buhanitse

Gufatana neza no kuramba

Kongera kubyazwa umusaruro mu byiciro byose by'umusaruro

Amaherezo, kugenzura neza inenge bituma ibikoresho bitwikiriwe n’ingufu byujuje ibisabwa mu mikorere y’inganda zikora ibijyanye n’ikoranabuhanga, imodoka, ibikoresho by’ikoranabuhanga n’ubuvuzi.

—Iyi nkuru yasohotse na ibikoresho byo gusiga irangi ry'umwukauruganda rwa Zhenhua Vacuum