Lalacewar da Aka Fi Sani a Rufin Injin Tsaftacewa da Maganin Fasaharsu

Tsarin rufewa na injin tsotsar ruwa—gami da Fizik Vapor Deposition (PVD), Magnetron Sputtering, da Ion Plating—ana amfani da su sosai a cikin na'urorin gani, motoci, na'urorin lantarki, da na'urorin likitanci. Duk da fa'idodinsu wajen samar da fina-finai masu kauri, masu mannewa, da kuma masu aiki, masana'antun galibi suna fuskantar lahani na rufewa akai-akai. Waɗannan matsalolin suna shafar aikin fim kai tsaye, yawan samarwa, da kuma ingancin aikin.

Wannan labarin ya taƙaita mafi yawan lahani na rufi da kuma matakan kariya daga injiniya.

1. Kauri Ba Tare Da Daidaito Ba

Dalilai Na Musamman:

Tsarin da bai dace ba na manufa-zuwa-ƙasa

Rashin isasshen motsi ko rashin daidaito na substrate (juyawa, motsi na duniya, ko jigilar layi)

Matsakaicin yawan ƙwayoyin plasma a cikin babban yanki

Maganin Fasaha:

Inganta tsarin tsara cathode/manufa don ingantaccen rarraba kusurwa

Inganta kayan haɗin substrate da sarrafa motsi don rama bambance-bambancen gida

Daidaita matsin lamba na aiki, rarraba wutar lantarki, da kuma tsarin filin maganadisu

2. Rashin Mannewa Mai Kyau / Rage Fim

Dalilai Na Musamman:

Gurɓataccen saman substrate (sauran mai, danshi, ko oxides na asali)

Babban matsin lamba a cikin ciki a cikin matakin da aka ajiye

Rashin layukan da ke ƙara mannewa

Maganin Fasaha:

Ƙarfafa substrate kafin a fara magani: tsaftacewar ultrasonic, etching na plasma, ko bombardment na ion

Daidaita ƙarfin lantarki da zafin jiki na substrate don rage tarin damuwa

Gabatar da matakan mannewa na matsakaici kamar Ti ko Cr don inganta haɗin fim da substrate

3. Gurɓatar da ƙananan ramuka da ƙwayoyin cuta

Dalilai Na Musamman:

Gurɓataccen ƙwayoyin cuta a cikin ɗakin injin

Tarkon da aka yi niyya ko kuma fashewar saman yayin sputtering

Bayan kwararar tururin mai daga tsarin famfo

Maganin Fasaha:

Kula da tsarin lodawa da sarrafa kayan aiki na matakin tsabta a ɗaki

Yi amfani da maƙasudin tsarki mai kyau, mai kyau don rage tofawa da fashewa

A riƙa gyara famfunan ruwa akai-akai sannan a sanya tarkunan mai ko baffles masu fashewa don hana gurɓatawa

4. Rashin Tsagewa ko Rashin Damuwa a Fim

Dalilai Na Musamman:

Yawan damuwa a cikin jiki a cikin kauri mai kauri

Rashin daidaituwar faɗaɗawar zafi tsakanin shafi da substrate

Saurin zagayawar zafi/sanyi yana haifar da girgizar zafi

Maganin Fasaha:

Sarrafa kauri da kuma yawan ajiyar fim don rage tarin damuwa

Tsara fenti mai layi-layi ko kuma mai tsari don rage yawan damuwa

Aiwatar da haɓaka zafin jiki mai sarrafawa yayin zagayowar tsari

5. Canjin Launi da Rashin Daidaito na Ganuwa

Dalilai Na Musamman:

Kauri karkacewa a cikin rufin tsangwama na gani

Guduwar iskar gas mai amsawa mara tabbas yayin sputtering mai amsawa (O₂, N₂, da sauransu)

Canjin wutar lantarki ko rashin daidaiton baka

Maganin Fasaha:

Yi amfani da tsarin sa ido a wurin (masu saka idanu na kristal na quartz, masu sa ido a gani)

Daidaita kwararar iskar gas ta amfani da masu sarrafa kwararar mass (MFCs)

Tabbatar da isar da wutar lantarki mai ɗorewa tare da rage tasirin arc-suppression da kuma sarrafa martani

Kammalawa

Ingancin murfin injin yana da matuƙar tasiri ga shirye-shiryen substrate, sigogin tsari, yanayin ɗakin, da kwanciyar hankali na kayan aiki. Ta hanyar magance matsalolin da ke sama da kyau tare da mafita bisa ga injiniya, masana'antun za su iya cimma:

Mafi kyawun daidaiton fim

Mannewa mai ƙarfi da karko

Babban sake samarwa a cikin rukunin samarwa

A ƙarshe, ingantaccen tsarin kula da lahani yana tabbatar da cewa samfuran da aka shafa a cikin injin sun cika ƙa'idodin aiki na masana'antar gani, motoci, lantarki, da likitanci.

—An buga wannan labarin ne ta hannun kayan aikin shafa injinmasana'anta Zhenhua injin injin