Cov txheej txheem txheej txheej nqus tsev—xws li Physical Vapor Deposition (PVD), Magnetron Sputtering, thiab Ion Plating—tau siv dav hauv kev kho qhov muag, tsheb, khoom siv hluav taws xob, thiab cov khoom siv kho mob. Txawm hais tias lawv muaj txiaj ntsig zoo hauv kev tsim cov zaj duab xis nyias, nplaum, thiab ua haujlwm tau zoo, cov chaw tsim khoom feem ntau ntsib cov teeb meem txheej txheej rov tshwm sim. Cov teeb meem no cuam tshuam ncaj qha rau kev ua haujlwm ntawm zaj duab xis, cov txiaj ntsig ntawm kev tsim khoom, thiab kev ntseeg siab ntawm cov txheej txheem.
Tsab xov xwm no piav qhia txog cov teeb meem feem ntau ntawm cov txheej txheem thiab cov kev tiv thaiv kev tsim kho.
1. Cov Zaj Duab Xis Tsis Sib Xws
Cov Ua Rau Feem Ntau:
Cov duab geometry tsis raug ntawm lub hom phiaj-rau-substrate
Kev txav ntawm cov substrate tsis txaus lossis tsis raug (kev tig, kev txav ntawm lub ntiaj teb, lossis kev thauj mus los ncaj)
Cov kev hloov pauv ntawm cov plasma density hauv cov chaw loj
Kev daws teeb meem kev siv tshuab:
Txhim kho cathode / target array tsim rau kev faib tawm zoo dua
Txhim kho qhov khoom siv substrate thiab kev tswj kev txav mus los kom them rau qhov sib txawv hauv zos
Kho kom zoo dua qhov siab ua haujlwm, kev faib hluav taws xob, thiab kev teeb tsa lub zog sib nqus
2. Kev nplaum tsis zoo / Zaj duab xis tawg
Cov Ua Rau Feem Ntau:
Cov khoom siv uas muaj kuab paug (cov roj seem, cov dej noo, lossis cov oxides ib txwm muaj)
Kev ntxhov siab siab hauv cov txheej tso rau hauv
Tsis muaj cov interlayers uas txhawb kev nplaum
Kev daws teeb meem kev siv tshuab:
Txhim kho cov khoom siv ua ntej: kev ntxuav ultrasonic, plasma etching, lossis ion bombardment
Kho qhov voltage thiab kub ntawm lub substrate kom txo qhov kev ntxhov siab
Qhia cov txheej txheem nplaum nruab nrab xws li Ti lossis Cr los txhim kho kev sib txuas ntawm zaj duab xis thiab cov khoom siv
3. Cov qhov me me thiab cov khoom me me uas muaj kuab paug
Cov Ua Rau Feem Ntau:
Kev ua qias tuaj ntawm cov khoom me me hauv lub tshuab nqus tsev vacuum
Lub hom phiaj arcing lossis nto flaking thaum lub sij hawm sputtering
Kev rov qab ntws ntawm cov pa roj los ntawm cov tshuab twj tso kua mis
Kev daws teeb meem kev siv tshuab:
Tswj cov txheej txheem thauj khoom thiab kev tuav pov hwm hauv chav huv
Siv cov hom phiaj uas muaj kev ntshiab siab, sib txuas zoo kom txo qhov ntuav thiab tawg.
Tsis tu ncua kho cov twj tso kua mis thiab teeb tsa cov cuab yeej ntes roj lossis cov baffles cryogenic kom tiv thaiv kev ua qias tuaj.
4. Kev tawg lossis zaj duab xis tsis ua haujlwm zoo
Cov Ua Rau Feem Ntau:
Kev ntxhov siab ntau dhau hauv cov txheej tuab
Kev sib txawv ntawm thermal expansion ntawm txheej thiab substrate
Kev kub/txias sai ua rau muaj kev poob siab thermal
Kev daws teeb meem kev siv tshuab:
Tswj cov zaj duab xis tuab thiab qhov nrawm ntawm kev tso tawm kom txo qhov kev ntxhov siab
Tsim cov txheej txheej ntau txheej lossis cov txheej txheem sib xyaw ua ke kom txo qhov kev ntxhov siab
Siv kev tswj qhov kub thiab txias thaum lub sijhawm ua haujlwm
5. Kev Hloov Xim thiab Kev Tsis Sib Xws ntawm Qhov Muag
Cov Ua Rau Feem Ntau:
Kev sib txawv ntawm qhov tuab hauv cov txheej txheem cuam tshuam kev kho qhov muag
Cov pa roj tsis ruaj khov thaum lub sijhawm ua kom tawg (O₂, N₂, thiab lwm yam)
Kev hloov pauv ntawm lub zog fais fab lossis kev tsis ruaj khov ntawm arc
Kev daws teeb meem kev siv tshuab:
Siv cov txheej txheem saib xyuas hauv qhov chaw (quartz crystal monitors, optical monitoring)
Siv cov cuab yeej tswj kev ntws ntawm cov pa roj kom ruaj khov (MFCs)
Xyuas kom muaj kev xa hluav taws xob ruaj khov nrog kev tswj hwm arc thiab kev tawm tswv yim
Xaus lus
Qhov zoo ntawm cov txheej txheem nqus tsev yog qhov rhiab heev rau kev npaj cov khoom siv, cov txheej txheem txheej txheem, ib puag ncig hauv chav tsev, thiab kev ruaj khov ntawm cov khoom siv. Los ntawm kev daws teeb meem saum toj no nrog cov kev daws teeb meem engineering, cov tuam txhab tsim khoom tuaj yeem ua tiav:
Kev sib npaug zoo ntawm zaj duab xis
Muaj zog nplaum thiab ua haujlwm ntev
Muaj peev xwm ua tau ntau yam khoom thoob plaws ntau lawm
Thaum kawg, kev tswj hwm qhov tsis zoo kom zoo ua kom cov khoom siv nqus tsev ua tau raws li qhov yuav tsum tau ua ntawm kev lag luam optics, automotive, electronics, thiab kev kho mob.
— Tsab xov xwm no tau luam tawm los ntawm cov khoom siv nqus tsev txheejChaw tsim khoom Zhenhua Lub Tshuab Nqus Tsev
Lub sijhawm tshaj tawm: Cuaj hlis-20-2025