Lisebelisoa tsa ho hloekisa plasma ea vacuum li amohela sebopeho se kopaneng, se nang le sistimi ea ho hloekisa ion ea RF, taolo e iketsang ka botlalo, ts'ebetso le tlhokomelo e bonolo.
Jenereithara ea maqhubu a phahameng ea RF e ka hlahisa plasma e nang le bongata bo phahameng, ea kenya tšebetsong, ea hlaba le ho lahla bokaholimo ba mosebetsi, ea tlosa lerōle le mafura ka katleho holim'a sehlahisoa, ea lokolla khatello ea bokaholimo, 'me ea fumana liphetoho tse fapaneng holim'a mosebetsi.
E sebetsa ho rabara, khalase, ceramic, tšepe le lihlahisoa tse ling, 'me e sebelisoa ho li-microelectronics, LCD, LED, LCM, PCB circuit board, liphutheloana tsa semiconductor, lisebelisoa tsa bongaka, liteko tsa mahlale a bophelo le masimo a mang.