O masini e faʻamamā ai le plasma e faʻaaogaina le fausaga tuʻufaʻatasia, faʻapipiʻiina i le faiga faʻamamāina o le RF ion, pulea atoatoa, faʻagaoioia faigofie ma tausiga.
E mafai e le generator RF maualuga-frequency ona gaosia le plasma maualuga-mafiafia, faʻagaoioia, vaneina ma faʻamamāina le fogāeleele o le workpiece, aveese lelei le pefu ma le gaʻo i luga o le fogāeleele o le oloa, faʻasaʻoloto le mamafa o le fogāeleele, ma maua ai ni suiga eseese i luga o le fogāeleele o le workpiece.
E faʻaaogaina i le paʻu, tioata, seramika, uʻamea ma isi oloa, ma e faʻaaogaina foʻi i microelectronics, LCD, LED, LCM, laupapa matagaluega PCB, afifiina semiconductor, masini faafomaʻi, faʻataʻitaʻiga o le saienisi o le ola ma isi matāʻupu.