Imishini yokuhlanza i-vacuum plasma isebenzisa isakhiwo esihlanganisiwe, ifakwe uhlelo lokuhlanza i-RF ion, ukulawula okuzenzakalelayo ngokuphelele, ukusebenza okulula nokugcinwa.
Ijeneretha ye-RF ephezulu ingakhiqiza i-plasma enobuningi obukhulu, isebenze, ikhiphe futhi ichithe ubuso bezinto zokusebenza, isuse ngempumelelo uthuli namafutha ebusweni bomkhiqizo, ikhulule ukucindezeleka kobuso, futhi ithole izinguquko ezahlukahlukene ebusweni bezinto zokusebenza.
Isebenza enjolobeni, engilazini, e-ceramic, ensimbini nakweminye imikhiqizo, futhi isetshenziswa kuma-microelectronics, e-LCD, e-LED, e-LCM, ebhodini lesifunda le-PCB, ekupakisheni kwe-semiconductor, kumadivayisi ezokwelapha, ekuhlolweni kwesayensi yokuphila nakweminye imikhakha.