Uburyo bwo gukora polymerization ya plasma mu buryo butaziguye

Uburyo bwo gukora polymerization ya plasma mu buryo butaziguye

Uburyo bwo gukora polymerization ya Plasma bworoshye cyane haba ku bikoresho bya polymerization ya electrode imbere ndetse no ku bikoresho bya polymerization ya electrode yo hanze, ariko guhitamo parameters ni ingenzi cyane muri polymerization ya Plasma, kuko parameters zigira ingaruka zikomeye ku miterere n'imikorere ya polymer films mu gihe cya polymerization ya Plasma.

Intambwe z'imikorere yo gutunganya plasma mu buryo butaziguye ni izi zikurikira:

(1) Gusukura isuku

Ingufu y'inyuma ya polymerization mu gihe cy'ingufu igomba kuvomwa kuri 1.3 × 10-1Pa. Ku bijyanye n'imikorere ya polymerization isaba ibisabwa byihariye kugira ngo hagenzurwe ingano ya ogisijeni cyangwa azote, ingufu y'inyuma ya polymerization irushaho kuba nini.

(2) Monomer y'ihinduka ry'ingufu cyangwa gazi ivanze ya gazi itwara abantu na monomer

Igipimo cy'ubushyuhe ni 13-130Pa. Ku bijyanye na polimera ya Plasma isaba akazi, hagomba gutoranywa uburyo bukwiye bwo kugenzura ubwiyongere bw'amazi n'umuvuduko w'amazi, muri rusange 10.100mL/min. Muri plasma, molekile za monomer zishyirwamo iyoni kandi zigatandukana no guterwa n'uduce dufite ingufu, bigatuma uduce dufite imbaraga nka iyoni na genes zikora. Uduce dufite imbaraga twa plasma dushobora kunyura muri polimera ya Plasma aho gazi ihurira n'ingufu. Monomer ni isoko y'ibanze rya polimera ya Plasma, kandi gaze na monomer byinjiye bigomba kugira ubuziranenge runaka.

(3) Guhitamo amashanyarazi akoreshwa mu gukurura

Plasma ishobora gukorwa hakoreshejwe ingufu za DC, high-frequency, RF, cyangwa micro-onde kugira ngo habeho ibidukikije bya plasma byo gupolima. Guhitamo ingufu zitangwa bigenwa hashingiwe ku bisabwa ku miterere n'imikorere ya polymer.

(4) Guhitamo uburyo bwo gusohora

Ku bijyanye n'ibisabwa na polimeri, polimerasiyo ya plasma ishobora guhitamo uburyo bubiri bwo gusohora: gusohora amazi mu buryo buhoraho cyangwa gusohora amazi mu buryo bw'ingufu.

(5) Guhitamo ibipimo byo gusohora

Mu gihe cyo gukora polimerasiyo ya Plasma, ibipimo byo gusohora bigomba kwitabwaho uhereye ku bipimo bya plasma, imiterere ya polimera n'ibisabwa mu miterere. Ingano y'imbaraga zikoreshwa mu gihe cyo gupomerasiyo igenwa n'ingano y'icyumba cy'ubusamo, ingano ya electrode, umuvuduko w'amazi ya monomer n'imiterere yayo, umuvuduko wa polimerasiyo, n'imiterere ya polimera n'imikorere yayo. Urugero, niba ingano y'icyumba cy'ubusamo ari 1L kandi polimerasiyo ya RF ya Plasma ikoreshejwe, imbaraga zo gusohora izaba iri hagati ya 10 ~ 30W. Muri ubwo buryo, plasma ikorwa ishobora kwishyira hamwe igakora filime nto ku buso bw'ikintu gikorerwamo. Umuvuduko w'ikura rya filime ya polimerasiyo ya Plasma uratandukanye bitewe n'amashanyarazi, ubwoko bwa monomer n'umuvuduko w'amazi, hamwe n'imiterere y'imikorere. Muri rusange, umuvuduko w'ikura ni 100nm/min~1um/min.

(6) Gupima ibipimo mu gupima plasma

Ibipimo bya plasma n'ibipimo bya process bigomba gupimwa muri plasma polymerization birimo: voltage yo gusohora, current yo gusohora, frequency yo gusohora, ubushyuhe bwa electron, ubucucike, ubwoko bw'itsinda ry'ibisubizo n'ubwinshi, n'ibindi.

——Iyi nkuru yasohotse na Guangdong Zhenhua Technology,uruganda rukora imashini zisiga irangi ry'urumuri.