Te tukanga whakapūhui tika o te plasma
He tino māmā te tukanga whakapūhuitanga plasma mō ngā taputapu whakapūhuitanga electrode ā-roto me ngā taputapu whakapūhuitanga electrode o waho, engari he mea nui ake te whiriwhiri i ngā tawhā i roto i te whakapūhuitanga plasma, nā te mea he nui ake te pānga o ngā tawhā ki te hanganga me te mahi a ngā kiriata polymer i te wā o te whakapūhuitanga plasma.
Ko ngā mahi mō te whakapūhuitanga toto tika koia ēnei:
(1) Te horoi horoi
Me papu te korehau papamuri o te whakapūhui i raro i ngā āhuatanga korehau ki te 1.3×10-1Pa. Mō ngā tauhohenga whakapūhui e hiahia ana ki ngā whakaritenga motuhake mō te whakahaere i te ihirangi hāora, hauota rānei, he nui ake te whakaritenga mō te korehau papamuri.
(2) Monomer tauhohenga utu, hau whakaranu rānei o te hau kawe me te monomer
Ko te nekehanga korehau he 13-130Pa. Mō te whakapūhuitanga plasma e hiahia ana ki te mahi, me whiriwhiri te aratau whakahaere rere tika me te tere rere, ko te tikanga he 10.100mL/min. I roto i te plasma, ka whakakīia ngā ngota monomer ka wehea mā te pupuhi i ngā matūriki hihiko, ka hua ake he matūriki hohe pērā i ngā katote me ngā ira hohe. Ka taea e ngā matūriki hohe e whakahohehia ana e te plasma te whakapūhuitanga plasma i te atanga o te āhua hau me te āhua totoka. Ko te monomer te pūtake o te matūriki mō te whakapūhuitanga plasma, ā, me tino parakore te tauhohenga hau me te monomer.
(3) Te whiriwhiringa o te pūtake hiko whakaohooho
Ka taea te whakaputa i te parāma mā te whakamahi i ngā pūtake hiko DC, auau-tiketike, RF, ngaruiti rānei hei whakarato i tētahi taiao parāma mō te whakapūhui. Ka whakatauhia te kōwhiringa o te pūtake hiko i runga i ngā whakaritenga mō te hanganga me te mahi a te pūhui.
(4) Kōwhiringa o te aratau tukunga
Mō ngā whakaritenga pūmua, ka taea e te whakapūmuatanga toto te whiriwhiri i ngā momo tukunga e rua: te tukunga tonu, te tukunga pātere rānei.
(5) Te whiriwhiringa o ngā tawhā tukunga
I te wā e whakahaerehia ana te whakapūhuitanga plasma, me whai whakaaro ki ngā tawhā tukunga mai i ngā tawhā plasma, ngā āhuatanga polymer me ngā whakaritenga hanganga. Ko te nui o te mana e whakamahia ana i te wā o te whakapūhuitanga ka whakatauhia e te rōrahi o te rūma korehau, te rahi o te irahiko, te tere rere me te hanganga o te monomer, te tere whakapūhuitanga, me te hanganga me te mahi polymer. Hei tauira, mēnā he 1L te rōrahi o te rūma tauhohenga, ā, ka whakamahia te whakapūhuitanga plasma RF, ka noho te mana tukunga ki te awhe 10~30W. I raro i ēnei āhuatanga, ka taea e te plasma i hangaia te whakakotahi hei hanga i tētahi kiriata angiangi ki runga i te mata o te mea mahi. Ka rerekē te tere tipu o te kiriata whakapūhuitanga plasma i runga i te pūtake hiko, te momo monomer me te tere rere, me ngā āhuatanga tukanga. I te nuinga o te wā, ko te tere tipu he 100nm/min~1um/min.
(6) Te ine i ngā tawhā i roto i te whakapūhuitanga toto
Ko ngā tawhā parāuma me ngā tawhā tukanga hei ine i roto i te whakapūhui parāuma ko: te ngaohiko tukunga, te ia tukunga, te auau tukunga, te pāmahana irahiko, te kiato, te momo rōpū tauhohenga me te kukū, me ētahi atu.
——I tukuna tēnei tuhinga e Guangdong Zhenhua Technology, hekaihanga mīhini paninga whatu.
Wā tuku: Mei-05-2023