Ikoranabuhanga ryo gushyiramo imirasire ya Ion ni ikoranabuhanga ryo gusiga imirasire ya Ion no gusiga umwuka hamwe n'ikoranabuhanga ryo gutunganya ubuso bwa Ion. Mu gihe cyo guhindura ubuso bw'ibikoresho byashyizwemo ion, byaba ibikoresho bya semiconductor cyangwa ibikoresho by'ubuhanga, akenshi byifuzwa ko ubugari bw'urwego rwahinduwe buruta cyane ubwo gushyiramo ion, ariko nanone hagakenerwa kugumana ibyiza byo guteramo ion, nk'urwego rwahinduwe n'igice kiri hagati y'aho bihurira, bishobora gutunganywa ku bushyuhe bw'icyumba, n'ibindi. Kubwibyo, mu guhuza guteramo ion n'ikoranabuhanga ryo gusiga, ion zifite ingufu runaka zikomeza gushyirwa mu gice kiri hagati ya filime na substrate mu gihe cyo gusiga, kandi atome zo hagati zivanze hifashishijwe uburyo bwo gukubitana, zigakora agace k'impinduka zo kuvanga iatome hafi y'aho bihurira mbere kugira ngo hongerwe imbaraga zo guhuza hagati ya filime na substrate. Hanyuma, ku gace k'imvange ya atome, filime ifite ubunini n'imiterere bikenewe ikomeza gukura hamwe n'uruhare rw'umurasire wa ion.
Ibi byitwa Ion Beam Assisted Deposition (IBED), bigumana imiterere y’uburyo bwo gutera iyoni mu gihe bituma substrate ishyirwamo agakoresho gato gatandukanye rwose n’agace ka substrate.
Gushyiramo imirasire ya Ion bifite ibyiza bikurikira.
(1) Kubera ko amashanyarazi ya ion assisted deposition atanga plasma nta gaze isohoka, gusiga bishobora gukorwa ku gitutu cya <10-2 Pa, bigabanye kwandura kwa gaze.
(2) Ibipimo by'ibanze by'imikorere (ingufu za iyoni, ubucucike bwa iyoni) ni amashanyarazi. Muri rusange ntibikenewe kugenzura urujya n'uruza rwa gaze n'ibindi bipimo bitari amashanyarazi, ushobora kugenzura byoroshye imikurire y'urwego rwa firime, guhindura imiterere n'imiterere ya firime, byoroshye kwemeza ko isubiramo ry'imikorere.
(3) Ubuso bw'icyuma gikoreshwa bushobora gusigwaho firime itandukanye rwose n'iy'ubutaka kandi ubunini ntibugengwa n'ingufu za iyoni zo mu bwoko bwa bombardment ku bushyuhe buri hasi (<200℃). Ikwiriye gukoreshwa mu gutunganya firime zikora neza, imashini zikonje n'ibyuma by'ubwubatsi bifite ubushyuhe buke.
(4) Ni inzira idahuza igenzurwa ku bushyuhe bw'icyumba. Filimi nshya zikora nk'ibyiciro by'ubushyuhe bwinshi, ibyiciro bihamye, aloyi zidafite isura, nibindi bishobora kuboneka ku bushyuhe bw'icyumba.
Ingaruka mbi zo gushyira ion beam assistant deposition ni izi.
(1) Kubera ko imirasire ya iyoni ifite imiterere y'imirasire itaziguye, biragoye guhangana n'imiterere y'ubuso bugoye bw'igikoresho
(2) Biragoye gukorana n'ibikoresho binini n'ibinini bitewe n'ingano y'umugezi wa ion.
(3) Igipimo cyo gushyiramo ion beam assistant deposition gikunze kuba hafi 1nm/s, kikaba gikwiriye gutegura ibyuma bito, kandi ntikikwiriye no gushyiramo ibintu byinshi.
–Iyi nkuru yasohotse nauruganda rukora imashini zikora imashini zikoresha umwuka ushyushyeGuangdong Zhenhua
Igihe cyo kohereza: Ugushyingo-16-2023