Fasahar da ke taimakawa wajen adana ion beam

Fasahar da aka taimaka wa ion beam deposition ita ce fasahar allurar ion beam da tururi deposition tare da fasahar sarrafa saman ion composite. A cikin tsarin gyaran saman kayan da aka allurar ion, ko kayan semiconductor ko kayan injiniya, sau da yawa ana son cewa kauri na Layer da aka gyara ya fi na dasa ion, amma kuma ana son kiyaye fa'idodin tsarin allurar ion, kamar Layer da aka gyara da substrate tsakanin kaifi interface, ana iya sarrafa su a yanayin zafin ɗaki, da sauransu. Saboda haka, ta hanyar haɗa ion dasawa da fasahar rufi, ana ci gaba da allurar ions masu wani kuzari cikin haɗin tsakanin fim ɗin da substrate yayin da ake shafa su, kuma ana haɗa atom ɗin da ke tsakanin fuska tare da taimakon karo na cascade, suna ƙirƙirar yankin sauyawa na haɗa atom kusa da haɗin farko don inganta ƙarfin haɗin tsakanin fim ɗin da substrate. Sannan, a yankin haɗa atom, fim ɗin da ke da kauri da kaddarorin da ake buƙata yana ci gaba da girma tare da haɗin gwiwar hasken ion.

Ana kiran wannan da Ion Beam Assisted Deposition (IBED), wanda ke riƙe da halayen tsarin dasa ion yayin da yake barin substrate ya rufe da wani siririn fim wanda ya bambanta da substrate gaba ɗaya.

Rarrabawar da aka yi da ion beam yana da fa'idodi masu zuwa.

(1) Tunda ion beam da ke taimakawa wajen adanawa yana samar da plasma ba tare da fitar da iskar gas ba, ana iya yin shafa a matsin lamba na <10-2 Pa, wanda ke rage gurɓatar iskar gas.

(2) Sigogi na asali na tsari (ƙarfin ion, yawan ion) na lantarki ne. Gabaɗaya ba kwa buƙatar sarrafa kwararar iskar gas da sauran sigogin da ba na lantarki ba, zaku iya sarrafa ci gaban layin fim cikin sauƙi, daidaita abun da ke ciki da tsarin fim ɗin, mai sauƙin tabbatar da maimaita aikin.

(3) Za a iya shafa saman kayan aikin da fim ɗin da ya bambanta da substrate gaba ɗaya kuma kauri ba ya iyakance ga kuzarin ions ɗin da aka jefa a ƙananan zafin jiki (<200℃). Ya dace da maganin saman fim ɗin da aka yi amfani da shi da doped, ƙirar injin sanyi da kuma ƙarfe mai laushi mai ƙarancin zafin jiki.

(4) Tsarin da ba shi da daidaito wanda ake sarrafawa a zafin ɗaki. Ana iya samun sabbin fina-finai masu aiki kamar matakan zafi mai yawa, matakan da ba su da tabbas, ƙarfe marasa tsari, da sauransu a zafin ɗaki.

Rashin kyawun wurin da aka sanya ion beam a cikinsa shine.

(1) Saboda hasken ion yana da halayen radiation kai tsaye, yana da wuya a magance siffar saman kayan aikin mai rikitarwa

(2) Yana da wahala a magance manyan kayan aiki da manyan wurare saboda iyakance girman kwararar ion beam.

(3) Yawan ajiyar ion beam da aka taimaka masa yawanci yana kusa da 1nm/s, wanda ya dace da shirya siraran fim, kuma bai dace da yin plating na adadi mai yawa na samfura ba.

– An fitar da wannan labarin ne dagainjin shafa injin injinGuangdong Zhenhua