Cov txheej txheem ion beam pab deposition yog cov txheej txheem ion beam txhaj tshuaj thiab vapor deposition txheej txheem ua ke nrog cov txheej txheem ua tiav ion surface composite. Hauv cov txheej txheem ntawm kev hloov kho qhov chaw ntawm cov khoom siv ion txhaj tshuaj, txawm tias cov ntaub ntawv semiconductor lossis cov ntaub ntawv engineering, nws feem ntau xav kom qhov tuab ntawm cov txheej hloov kho yog ntau dua li ntawm ion implantation, tab sis kuj xav kom khaws cov txiaj ntsig ntawm cov txheej txheem ion txhaj tshuaj, xws li cov txheej hloov kho thiab lub substrate ntawm qhov sib txuas ntse, tuaj yeem ua tiav ntawm chav tsev kub workpiece, thiab lwm yam. Yog li ntawd, los ntawm kev sib txuas ion implantation nrog cov txheej txheem txheej txheem, cov ions nrog qee lub zog raug txhaj tshuaj tas li rau hauv qhov sib txuas ntawm zaj duab xis thiab lub substrate thaum txheej, thiab cov atoms interfacial raug sib xyaw nrog kev pab los ntawm cascade collisions, tsim ib qho atom sib xyaw hloov pauv cheeb tsam ze ntawm qhov sib txuas pib kom txhim kho lub zog sib txuas ntawm zaj duab xis thiab lub substrate. Tom qab ntawd, ntawm thaj chaw sib xyaw atom, zaj duab xis nrog qhov tuab thiab cov khoom xav tau txuas ntxiv loj hlob nrog kev koom tes ntawm ion beam.
Qhov no hu ua Ion Beam Assisted Deposition (IBED), uas khaws cov yam ntxwv ntawm cov txheej txheem ion implantation thaum tso cai rau lub substrate kom coated nrog cov khoom siv zaj duab xis nyias uas txawv kiag li ntawm lub substrate.
Kev pab txhawb nqa ion beam deposition muaj cov txiaj ntsig hauv qab no.
(1) Vim tias cov ion beam pab tso tawm tsim cov plasma yam tsis muaj roj tawm, txheej txheej tuaj yeem ua tiav ntawm qhov siab ntawm <10-2 Pa, txo cov pa phem.
(2) Cov txheej txheem yooj yim (ion zog, ion ceev) yog hluav taws xob. Feem ntau tsis tas yuav tswj cov roj ntws thiab lwm yam tsis yog hluav taws xob, koj tuaj yeem yooj yim tswj kev loj hlob ntawm cov txheej zaj duab xis, kho cov khoom sib xyaw thiab cov qauv ntawm cov zaj duab xis, yooj yim kom ntseeg tau tias qhov rov ua dua ntawm cov txheej txheem.
(3) Qhov chaw ntawm qhov workpiece tuaj yeem coated nrog ib zaj duab xis uas txawv kiag li ntawm lub substrate thiab qhov tuab tsis txwv los ntawm lub zog ntawm cov bombardment ions ntawm qhov kub qis (<200 ℃). Nws yog qhov tsim nyog rau kev kho qhov chaw ntawm doped functional films, txias machined precision pwm thiab qis kub tempered structural steel.
(4) Nws yog ib qho txheej txheem tsis sib npaug uas tswj tau ntawm qhov kub thiab txias hauv chav. Cov yeeb yaj kiab ua haujlwm tshiab xws li cov theem kub siab, cov theem tsis ruaj khov, cov hlau tsis sib xws, thiab lwm yam tuaj yeem tau txais ntawm qhov kub thiab txias hauv chav.
Qhov tsis zoo ntawm kev siv ion beam assisted deposition yog.
(1) Vim tias lub teeb ion muaj cov yam ntxwv ntawm kev tawm hluav taws xob ncaj qha, nws nyuaj rau kev daws teeb meem ntawm cov duab ntawm qhov chaw ua haujlwm.
(2) Nws nyuaj rau kev ua haujlwm nrog cov khoom ua haujlwm loj thiab thaj chaw loj vim yog qhov txwv ntawm qhov loj ntawm cov dej ntws ion.
(3) Tus nqi tso tawm ntawm cov ion beam feem ntau yog nyob ib puag ncig 1nm / s, uas yog qhov tsim nyog rau kev npaj cov txheej nyias nyias, thiab tsis haum rau kev plating ntawm cov khoom ntau.
– Tsab xov xwm no yog tso tawm los ntawmlub tshuab nqus tsev txheej tshuab chaw tsim khoomGuangdong Zhenhua
Lub sijhawm tshaj tawm: Kaum Ib Hlis-16-2023