Teknụzụ ntinye aka nke ion beam nyeere aka

Teknụzụ ion nke enyere aka na itinye ihe n'ime oghere bụ teknụzụ mkpuchi ion na vapor deposition nke jikọtara ya na teknụzụ nhazi elu ion. N'ime usoro mgbanwe elu nke ihe ndị a gbanyere ion, ma ọ bụ ihe semiconductor ma ọ bụ ihe injinia, a na-achọkarị ka ọkpụrụkpụ nke oyi akwa agbanwere dị ukwuu karịa nke itinye ihe n'ime oghere ion, mana ọ na-achọkwa ịnọgide na-enwe uru nke usoro ntinye ihe n'ime oghere ion, dị ka oyi akwa agbanwere na ihe dị n'etiti njikọ dị nkọ, enwere ike ịhazi ya na ọrụ okpomọkụ ụlọ, wdg. Ya mere, site na ijikọta itinye ihe n'ime oghere ion na teknụzụ mkpuchi, a na-etinye ion nwere ike ụfọdụ n'ime njikọ dị n'etiti ihe nkiri ahụ na ihe dị n'ime oghere ahụ mgbe a na-ekpuchi ya, a na-agwakọtakwa atọm interfacial site n'enyemaka nke ihe ndị na-akpata ọgba aghara, na-emepụta mpaghara mgbanwe ngwakọta atọm dị nso na njikọ mbụ iji melite ike njikọ dị n'etiti ihe nkiri ahụ na ihe dị n'ime oghere ahụ. Mgbe ahụ, na mpaghara ngwakọta atọm, ihe nkiri nwere ọkpụrụkpụ na ihe onwunwe achọrọ na-aga n'ihu na-eto eto na ntinye nke ihe dị n'ime oghere ion.

A na-akpọ nke a Ion Beam Assisted Deposition (IBED), nke na-ejigide njirimara nke usoro ntinye ion ebe ọ na-ekwe ka e jiri ihe dị gịrịgịrị nke dị iche kpamkpam na ihe mkpuchi kpuchie ihe mkpuchi ahụ.

Ntinye aka nke ion ramp nwere uru ndị a.

(1) Ebe ọ bụ na ntinye ion nke na-enyere aka na-emepụta plasma na-enweghị mwepụ gas, enwere ike ime mkpuchi na nrụgide nke <10-2 Pa, na-ebelata mmetọ gas.

(2) Usoro nhazi bụ isi (ike ion, njupụta ion) bụ eletriki. N'ozuzu, ọ dịghị mkpa ijikwa usoro gas na paramita ndị ọzọ na-abụghị eletriki, ị nwere ike ijikwa uto nke oyi akwa ihe nkiri ahụ ngwa ngwa, gbanwee nhazi na nhazi nke ihe nkiri ahụ, ọ dị mfe iji hụ na usoro ahụ na-emegharị.

(3) Enwere ike iji ihe nkiri dị iche na ihe e ji kpuchie elu ihe e ji arụ ọrụ ahụ kpuchie elu ya, ike nke ion ndị e ji kpụọ ihe anaghị ejedebe n'okpomọkụ dị ala (<200℃). Ọ dabara adaba maka ọgwụgwọ elu nke ihe nkiri ndị e ji doped rụọ, ebu ndị e ji igwe oyi rụọ na ígwè e ji ígwè rụọ nke nwere obere okpomọkụ.

(4) Ọ bụ usoro na-anaghị agbanwe agbanwe nke a na-achịkwa na okpomọkụ ụlọ. Enwere ike nweta ihe nkiri ọhụrụ dị ka usoro okpomọkụ dị elu, usoro ndị na-adịghị agbanwe agbanwe, alloys amorphous, wdg. na okpomọkụ ụlọ.

Ihe ọghọm dị na ntinye aka nke ion beam bụ.

(1) Ebe ọ bụ na ion beam nwere njirimara radieshon kpọmkwem, ọ na-esiri ike ịnagide ọdịdị elu dị mgbagwoju anya nke workpiece ahụ

(2) Ọ na-esiri ike ịnagide ọrụ ndị buru ibu na nke buru ibu n'ihi oke nha nke iyi ion beam.

(3) Ọkwa ntinye ion nke enyere aka na ya na-abụkarị ihe dịka 1nm/s, nke dabara adaba maka nkwadebe nke ihe nkiri dị gịrịgịrị, ọ dịghịkwa mma maka itinye nnukwu ngwaahịa.

–E bipụtara akụkọ a site n'aka onyeigwe mkpuchi igwe emeputa ihe mkpuchiGuangdong Zhenhua