Ion beam yafashaga tekinoroji yo kubitsa

Ion beam ifashwa nubuhanga bwo kubitsa ni ion beam inshinge na tekinoroji yo kubika ibyuka hamwe na tekinoroji yo gutunganya ion. Muburyo bwo guhindura isura yibikoresho byatewe na ion, yaba ibikoresho bya semiconductor cyangwa ibikoresho bya injeniyeri, Bikunze kwifuzwa ko umubyimba wurwego rwahinduwe uruta kure cyane iyimikwa rya ion, ariko kandi ukaba ushaka kugumana ibyiza byuburyo bwo gutera inshinge za ion, nkibice byahinduwe hamwe na substrate hagati yubushyuhe bukabije bwicyumba, nibindi nibindi. Kubwibyo, muguhuza iyimikwa rya ion hamwe nubuhanga bwo gutwikira, ion hamwe ningufu runaka bihora byinjizwa mumwanya uri hagati ya firime na substrate mugihe utwikiriye, kandi atome zivanze zivanze hifashishijwe kugongana kwa casade, bigakora atom ivanga agace kinzibacyuho hafi yimbere yambere kugirango itezimbere imbaraga zihuza firime na substrate. Noneho, kuri zone ivanga atom, firime ifite uburebure bukenewe hamwe nimitungo ikomeza kwiyongera hamwe nuruhare rwa ion beam.

Ibi byitwa Ion Beam Assisted Deposition (IBED), igumana ibiranga inzira yo gutera ion mugihe yemerera substrate gutwikirwa nibikoresho bito bya firime bitandukanye cyane na substrate.

Ion beam ifashwa kubitsa ifite ibyiza bikurikira.

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(2) Ibipimo byibanze byingenzi (ingufu za ion, ubucucike bwa ion) ni amashanyarazi. Mubisanzwe, ntukeneye kugenzura gazi nibindi bikoresho bitari amashanyarazi, urashobora kugenzura byoroshye imikurire yimiterere ya firime, ugahindura imiterere nimiterere ya firime, byoroshye kwemeza ko inzira izasubirwamo.

. Irakwiriye kuvurwa hejuru yububiko bwa firime ikora, imashini ikonje ikonje hamwe nubushyuhe buke bwubushyuhe bwubatswe.

(4) Nuburyo butaringaniza bugenzurwa nubushyuhe bwicyumba. Filime nshya ikora nkubushyuhe bwo hejuru, ibyiciro bisimburwa, amorphous alloys, nibindi birashobora kuboneka mubushyuhe bwicyumba.

Ibibi bya ion beam ifashwa kubitsa ni.

(1) Kuberako urumuri rwa ion rufite ibiranga imirasire itaziguye, biragoye guhangana nuburyo bugoye bwibikorwa byakazi

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–Iyi ngingo yasohowe naimashini ikora imashiniGuangdong Zhenhua