Ion beam assisted deposition technology yog ion beam txhaj thiab vapor deposition txheej tshuab ua ke nrog ion deg composite ua technology. Nyob rau hauv tus txheej txheem ntawm kev hloov kho deg ntawm ion txhaj cov ntaub ntawv, txawm hais tias semiconductor cov ntaub ntawv los yog engineering cov ntaub ntawv, nws yog feem ntau xav tias lub thickness ntawm lub hloov txheej yog ntau ntau dua li ntawm ion implantation, tab sis kuj xav khaws qhov zoo ntawm cov txheej txheem ion txhaj tshuaj, xws li hloov txheej thiab substrate ntawm lub ntse interface, yuav ua tau nyob rau hauv chav tsev kub workpiece, thiab thiaj li nyob. Yog li ntawd, los ntawm kev sib txuas ion implantation nrog txheej thev naus laus zis, ions nrog qee lub zog tau txuas ntxiv mus rau hauv qhov sib cuam tshuam ntawm zaj duab xis thiab cov substrate thaum txheej txheej, thiab cov atoms interfacial sib xyaw nrog kev pab ntawm cascade kev sib tsoo, tsim ib qho atom sib tov hloov chaw nyob ze ntawm qhov pib interface los txhim kho lub zog sib txuas ntawm zaj duab xis thiab substrate. Tom qab ntawd, ntawm thaj chaw sib xyaw atom, zaj duab xis uas yuav tsum tau muaj cov tuab thiab cov khoom txuas ntxiv nrog kev koom tes ntawm ion beam.
Qhov no yog hu ua Ion Beam Assisted Deposition (IBED), uas khaws cov yam ntxwv ntawm cov txheej txheem ion implantation thaum tso cai rau lub substrate los coated nrog nyias zaj duab xis cov ntaub ntawv uas txawv kiag li ntawm substrate.
Ion beam assisted deposition muaj qhov zoo hauv qab no.
(1) Txij li thaum ion beam pab deposition generates plasma tsis muaj pa paug, txheej yuav ua tau ntawm ib tug siab ntawm <10-2 Pa, txo cov pa paug.
(2) Cov txheej txheem tseem ceeb (ion zog, ion ceev) yog hluav taws xob. Feem ntau tsis tas yuav tswj cov roj ntws thiab lwm yam tsis muaj hluav taws xob, koj tuaj yeem yooj yim tswj kev loj hlob ntawm cov yeeb yaj kiab txheej, kho qhov muaj pes tsawg leeg thiab cov qauv ntawm cov yeeb yaj kiab, yooj yim los xyuas kom meej qhov rov ua dua ntawm cov txheej txheem.
(3) Qhov saum npoo ntawm lub workpiece tuaj yeem coated nrog ib zaj duab xis uas txawv kiag li ntawm cov substrate thiab lub thickness tsis txwv los ntawm lub zog ntawm lub foob pob hluav taws ions ntawm qhov kub thiab txias (<200 ℃). Nws yog qhov tsim nyog rau kev kho deg ntawm doped cov yeeb yaj kiab ua haujlwm, txias machined precision pwm thiab kub kub tempered structural steel.
(4) Nws yog cov txheej txheem tsis sib npaug tswj ntawm chav tsev kub. Cov yeeb yaj kiab ua haujlwm tshiab xws li cov theem kub kub, cov theem substable, amorphous alloys, thiab lwm yam tuaj yeem tau txais ntawm chav tsev kub.
Qhov tsis zoo ntawm ion beam assisted deposition yog.
(1) Vim hais tias cov ion beam muaj cov yam ntxwv ntawm cov hluav taws xob ncaj qha, nws yog qhov nyuaj rau kev cuam tshuam nrog cov duab ntawm lub workpiece.
(2) Nws yog qhov nyuaj rau kev cuam tshuam nrog cov khoom loj thiab cov chaw ua haujlwm loj vim qhov kev txwv ntawm qhov loj ntawm ion beam kwj.
(3) Lub ion beam pab deposition tus nqi feem ntau yog nyob ib ncig ntawm 1nm / s, uas yog haum rau kev npaj ntawm nyias zaj duab xis txheej, thiab tsis haum rau lub plating ntawm ntau yam khoom.
– Zaj lus no yog tso tawm los ntawmtshuab nqus tsev txheej tshuab manufacturersGuangdong Zhenhua
Post lub sij hawm: Nov-16-2023