Ion katako da ke taimaka wa fasahar jigila ita ce allurar ion katako da fasahar rufewar tururi hade da fasahar sarrafa kayan ion. A kan aiwatar da surface gyare-gyare na ion allura kayan, ko semiconductor kayan ko injiniya kayan, Ana so sau da yawa cewa kauri daga cikin modified Layer ne yafi girma fiye da na ion implantation, amma kuma so su riƙe da abũbuwan amfãni daga cikin ion allura tsari, kamar modified Layer da substrate tsakanin kaifi dubawa, za a iya sarrafa a dakin da zazzabi workpiece, da sauransu. Saboda haka, ta hanyar hada ion implantation tare da shafi fasahar, ions tare da wani makamashi suna ci gaba da allura a cikin mu'amala tsakanin fim da substrate yayin da shafi, da kuma interfacial atom suna gauraye da taimakon cascade karo, forming wani zarra hadawa miƙa mulki yankin kusa da farko dubawa don inganta bonding karfi tsakanin fim da substrate. Sa'an nan, a kan atom hadawa zone, da fim da ake bukata kauri da kaddarorin ci gaba da girma tare da sa hannu na ion katako.
Wannan shi ake kira Ion Beam Assisted Deposition (IBED), wanda ke riƙe da halayen tsarin dasa ion yayin da ya ba da damar yin amfani da kayan da aka yi da kayan fim na bakin ciki wanda ya bambanta da substrate.
Ion beam taimaka ajiya yana da fa'idodi masu zuwa.
(1) Tun da ion beam taimaka ajiya yana haifar da plasma ba tare da fitar da iskar gas ba, ana iya yin sutura a matsa lamba na <10-2 Pa, rage gurɓataccen iskar gas.
(2) Ma'auni na asali na tsari ( makamashin ion, ion density) sune lantarki. Gabaɗaya ba buƙatar sarrafa iskar gas da sauran sigogin da ba na lantarki ba, zaku iya sarrafa girman girman fim ɗin cikin sauƙi, daidaita abun da ke ciki da tsarin fim ɗin, mai sauƙin tabbatar da sake maimaita aikin.
(3) The surface na workpiece za a iya mai rufi da wani fim wanda shi ne gaba daya daban-daban daga substrate da kauri ba a iyakance da makamashi na bombardment ions a low zazzabi (<200 ℃). Ya dace da saman jiyya na doped aikin fina-finai, sanyi machined madaidaicin kyawon tsayuwa da ƙananan zafin jiki tempered tsarin karfe.
(4) Tsari ne mara daidaituwa wanda ake sarrafa shi a zafin jiki. Sabbin fina-finai masu aiki kamar matakan zafin jiki, matakan da ba za a iya jurewa ba, gami da amorphous alloys, da sauransu ana iya samun su a cikin zafin jiki.
Abubuwan da ake amfani da su na ion beam taimaka wa jijiya sune.
(1) Saboda ion katako yana da halaye na radiation kai tsaye, yana da wuya a magance hadadden siffar farfajiyar aikin
(2) Yana da wuya a yi aiki tare da manyan kayan aiki masu girma da kuma babban yanki saboda iyakance girman girman rafi na ion.
(3) Ƙimar da aka taimaka wa ion beam yawanci kusan 1nm / s, wanda ya dace da shirye-shiryen fina-finai na bakin ciki, kuma bai dace da plating na samfurori masu yawa ba.
–An fitar da wannan labarininjin shafa injin injinGuangdong Zhenhua
Lokacin aikawa: Nuwamba-16-2023