Ukususwa Komoya Wekhemikhali (i-CVD). Njengoba igama lisho, kuyindlela esebenzisa ama-reactant angaphambi kwegesi ukukhiqiza amafilimu aqinile ngokusebenzisa ukusabela kwamakhemikhali e-athomu kanye naphakathi kwama-molecule. Ngokungafani ne-PVD, inqubo ye-CVD yenziwa kakhulu endaweni enengcindezi ephezulu (i-vacuum ephansi), lapho ingcindezi ephezulu isetshenziswa ngokuyinhloko ukwandisa izinga lokufakwa kwefilimu. Ukufakwa komoya wekhemikhali kungahlukaniswa nge-CVD ejwayelekile (eyaziwa nangokuthi i-thermal CVD) kanye nokufakwa komoya wekhemikhali othuthukisiwe nge-plasma (i-Plasma-Enhanced Chemical Vapor Deposition. PECVD) ngokuya ngokuthi i-plasma iyabandakanyeka yini enkambisweni yokufakwa. Lesi sigaba sigxile kubuchwepheshe be-PECVD okuhlanganisa inqubo ye-PECVD kanye nemishini ye-PECVD esetshenziswa njalo kanye nesimiso sokusebenza.
Ukufakwa komoya wamakhemikhali othuthukisiwe nge-plasma kuyindlela yokufakwa komoya wamakhemikhali ocwebezelayo esebenzisa i-plasma yokukhipha ukukhanya ukuze ibe nethonya enkambisweni yokufakwa komoya ngenkathi inqubo yokufakwa komoya wamakhemikhali ocindezelwe kancane isenzeka. Ngale ndlela, ubuchwepheshe be-CVD obujwayelekile buthembele emazingeni okushisa aphezulu ukuze kufezwe ukusabela kwamakhemikhali phakathi kwezinto zesigaba segesi kanye nokufakwa kwamafilimu amancane, ngakho-ke kungabizwa ngokuthi ubuchwepheshe be-CVD obushisayo.
Kudivayisi ye-PECVD, ingcindezi yegesi esebenzayo icishe ibe ngu-5~500 Pa, kanti ubuningi bama-electron nama-ion bungafinyelela ku-109~1012/cm3, kanti amandla ajwayelekile ama-electron angafinyelela ku-1~10 eV. Okuhlukanisa indlela ye-PECVD kwezinye izindlela ze-CVD ukuthi i-plasma iqukethe inani elikhulu lama-electron anamandla aphezulu, anganikeza amandla okusebenza adingekayo enkambisweni yokufaka umusi wamakhemikhali. Ukushayisana kwama-electron nama-molecule esigaba segesi kungakhuthaza ukubola, ukwenziwa kwe-chemosynthesis, ukuvusa kanye nezinqubo ze-ionization zama-molecule egesi, kukhiqize amaqembu amakhemikhali asabela kakhulu, ngaleyo ndlela kuncishiswe kakhulu izinga lokushisa lokufakwa kwefilimu encane ye-CVD, okwenza kube nokwenzeka ukufeza inqubo ye-CVD, okwakudingeka ekuqaleni yenziwe emazingeni okushisa aphezulu, emazingeni okushisa aphansi. Inzuzo yokufakwa kwefilimu encane emazingeni okushisa aphansi ukuthi ingagwema ukusabalala okungadingekile kanye nokusabela kwamakhemikhali phakathi kwefilimu ne-substrate, izinguquko zesakhiwo kanye nokuwohloka kwefilimu noma izinto ze-substrate, kanye nokucindezeleka okukhulu kokushisa efilimini kanye ne-substrate.
–Lesi sihloko sikhishwe yi-umenzi womshini wokumboza nge-vacuumI-Guangdong Zhenhua
Isikhathi sokuthunyelwe: Ephreli-18-2024