Te Whakatakotoranga Kohu Matū (CVD). E ai ki te ingoa, he tikanga tēnei e whakamahi ana i ngā matū tauhohenga hau hei whakaputa kiriata totoka mā roto i ngā tauhohenga matū ngota me ngā tauhohenga matū i waenga i ngā ngota. Kāore i rite ki te PVD, ko te tukanga CVD ka mahia i roto i te taiao pēhanga teitei ake (korehau iti), me te pēhanga teitei ake ka whakamahia hei whakanui ake i te tere whakatakoto o te kiriata. Ka taea te whakarōpū i te whakatakoto kohu matū ki te CVD whānui (e mōhiotia ana ko te CVD wera) me te whakatakoto kohu matū whakarei ake i te plasma (Te Whakatakotoranga Kohu Matū Whakarei ake i te Plasma. PECVD) i runga i te whai wāhi o te plasma ki te tukanga whakatakoto. Ka arotahi tēnei wāhanga ki te hangarau PECVD tae atu ki te tukanga PECVD me ngā taputapu PECVD e whakamahia whānuitia ana me te mātāpono mahi.
Ko te whakatakotoranga kohu matū whakarei ake i te plasma he tikanga whakatakotoranga kohu matū kiriata-angiangi e whakamahi ana i te plasma tukunga kanapa hei whai pānga ki te tukanga whakatakotoranga i te wā e whakahaerehia ana te tukanga whakatakotoranga kohu matū pēhanga-iti. I roto i tēnei tikanga, ka whakawhirinaki te hangarau CVD tuku iho ki ngā pāmahana papa teitei ake hei whakatutuki i te tauhohenga matū i waenga i ngā matū āhua hau me te whakatakotoranga o ngā kiriata angiangi, ā, nō reira ka taea te kī ko te hangarau CVD wera.
I roto i te taputapu PECVD, ko te pēhanga hau mahi e tata ana ki te 5~500 Pa, ā, ka taea e te kiato o ngā irahiko me ngā katote te eke ki te 109~1012/cm3, ko te kaha toharite o ngā irahiko ka taea e te 1~10 eV. Ko te mea e wehewehe ana i te tikanga PECVD mai i ētahi atu tikanga CVD ko te nui o ngā irahiko kaha-teitei kei roto i te plasma, ka taea te whakarato i te kaha whakahohe e hiahiatia ana mō te tukanga whakatakotoranga kohu matū. Mā te tukinga o ngā irahiko me ngā ngota hau-āhua ka taea te whakatairanga i ngā tukanga wetewete, chemosynthesis, whakaoho me te ionization o ngā ngota hau, ka puta he rōpū matū tino tauhohe, ā, ka tino whakaitihia te awhe pāmahana o te whakatakotoranga kiriata angiangi CVD, ka taea ai te whakatutuki i te tukanga CVD, e hiahiatia ana kia mahia i te tīmatanga i ngā pāmahana teitei, i ngā pāmahana iti. Ko te painga o te whakatakotoranga kiriata angiangi pāmahana iti ko te karo i te horapa me te tauhohenga matū koretake i waenga i te kiriata me te papa, ngā huringa hanganga me te hekenga o te kiriata, te rauemi papa rānei, me ngā ahotea wera nui i roto i te kiriata me te papa.
–Nā tekaihanga mīhini paninga korehauGuangdong Zhenhua
Wā tuku: 18 Paenga-whāwhā 2024