Babi na 1 na Ingantaccen Tsarin Tururin Sinadaran da ke Cikin Plasma

Bayanin Tururin Sinadarai (CVD). Kamar yadda sunan ya nuna, wata dabara ce da ke amfani da sinadaran da ke haifar da iskar gas don samar da fina-finai masu ƙarfi ta hanyar halayen sinadarai na atomic da intermolecular. Ba kamar PVD ba, tsarin CVD galibi ana gudanar da shi ne a cikin yanayi mafi girma na matsin lamba (ƙananan injinan iska), tare da amfani da mafi girman matsin lamba musamman don ƙara yawan ajiyar fim ɗin. Ana iya rarraba ajiyar tururin sinadarai zuwa CVD gabaɗaya (wanda aka sani da thermal CVD) da kuma ajiyar tururin sinadarai da aka inganta a cikin plasma (Bayanin Tubar Sinadarai da aka Inganta a cikin Plasma. PECVD) dangane da ko plasma yana da hannu a cikin tsarin ajiyar. Wannan sashe yana mai da hankali kan fasahar PECVD gami da tsarin PECVD da kayan aikin PECVD da aka saba amfani da su da ƙa'idar aiki.

Tacewar tururin sinadarai da aka inganta a cikin plasma wata dabara ce ta adana tururin sinadarai mai siriri wanda ke amfani da sinadarin plasma mai fitar da haske don yin tasiri ga tsarin adanawa yayin da ake gudanar da aikin adana tururin sinadarai mai ƙarancin matsin lamba. A wannan ma'anar, fasahar CVD ta al'ada ta dogara ne akan yanayin zafi mafi girma don cimma tasirin sinadarai tsakanin abubuwan da ke cikin iskar gas da kuma adana fina-finai masu siriri, don haka ana iya kiranta fasahar CVD ta thermal.

A cikin na'urar PECVD, matsin lamba na iskar gas mai aiki yana da kusan 5~500 Pa, kuma yawan electrons da ions na iya kaiwa 109~1012/cm3, yayin da matsakaicin kuzarin electrons na iya kaiwa 1~10 eV. Abin da ya bambanta hanyar PECVD da sauran hanyoyin CVD shine cewa plasma yana ɗauke da adadi mai yawa na electrons masu ƙarfi, wanda zai iya samar da kuzarin kunnawa da ake buƙata don tsarin ajiyar tururin sinadarai. Haɗarin electrons da ƙwayoyin iskar gas na iya haɓaka rugujewa, kemosynthesis, haɓaka da tsarin ionization na ƙwayoyin iskar gas, yana samar da ƙungiyoyin sinadarai masu amsawa sosai, don haka rage yawan zafin jiki na ajiyar fim ɗin CVD mai siriri sosai, yana ba da damar aiwatar da tsarin CVD, wanda da farko ake buƙatar aiwatarwa a yanayin zafi mai yawa, a ƙananan yanayin zafi. Amfanin ajiyar fim mai siriri mai ƙarancin zafi shine cewa yana iya guje wa yaɗuwa mara amfani da amsawar sinadarai tsakanin fim ɗin da substrate, canje-canjen tsari da lalacewar fim ɗin ko kayan substrate, da kuma manyan damuwa na zafi a cikin fim ɗin da substrate.

– An fitar da wannan labarin ne dagainjin shafa injin injinGuangdong Zhenhua